After more than thirty years of effectiveness, associated benefits to the electronics industry and several false alarms, it appears that Moore's Law' is again threatened with derailment. These threats are in the form of a convergence of three waves which requires major necessary changes relating to: a)Lithography below O.l3?m, which involves printing and aligning at sub-micron wavelength dimensions with new unproven lasers/lens systems. b)Cu/low-? interconnect technology, which is facing major challenges in achieving commercially viable yields. c )300mm wafer size conversion, which requires an extensive retooling of the entire industry.