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IEEE-INNS-ENNS International Joint Conference on Neural Networks (IJCNN'00)-Volume 6
Surface Identification Using Angle Resolved Light Scatter Measurements
Como, Italy
July 24-July 27
ISBN: 0-7695-0619-4
ASCII Text
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T. Rinder, H. Rothe, "Surface Identification Using Angle Resolved Light Scatter Measurements," Neural Networks, IEEE - INNS - ENNS International Joint Conference on, vol. 6, pp. 6067, IEEE-INNS-ENNS International Joint Conference on Neural Networks (IJCNN'00)-Volume 6, 2000.
 
 
BibTex
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@article{ 10.1109/IJCNN.2000.859374,
author = {T. Rinder and H. Rothe},
title = {Surface Identification Using Angle Resolved Light Scatter Measurements},
journal ={Neural Networks, IEEE - INNS - ENNS International Joint Conference on},
volume = {6},
year = {2000},
issn = {1098-7576},
pages = {6067},
doi = {http://doi.ieeecomputersociety.org/10.1109/IJCNN.2000.859374},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
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TY - CONF
JO - Neural Networks, IEEE - INNS - ENNS International Joint Conference on
TI - Surface Identification Using Angle Resolved Light Scatter Measurements
SN - 1098-7576
SP
EP
A1 - T. Rinder,
A1 - H. Rothe,
PY - 2000
KW - light scattering
KW - ARS measurements
KW - surface microtopography identification
KW - neural networks
VL - 6
JA - Neural Networks, IEEE - INNS - ENNS International Joint Conference on
ER -
 
T. Rinder, University of the Federal Armed Forces in Hamburg
H. Rothe, University of the Federal Armed Forces in Hamburg
Observing the light scattered back from an illuminated surface is a fast and non-contact method to characterize surface microtopography. It is very largely applied in semiconductor industry by using goniometers. This paper deals with surface microtopography identification based on angle resolved light scatter measurements using neural pattern recognition methods and a very fast-calibrated scatter sensor for the purpose of automated surface inspection in precision engineering.
Index Terms:
light scattering, ARS measurements, surface microtopography identification, neural networks
Citation:
T. Rinder, H. Rothe, "Surface Identification Using Angle Resolved Light Scatter Measurements," ijcnn, vol. 6, pp.6067, IEEE-INNS-ENNS International Joint Conference on Neural Networks (IJCNN'00)-Volume 6, 2000
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