A Tunable RF MEMS Inductor

	This Article
	Subscribers, please Login Purchase article: $19 PDF RSS feed
	Share
	Email this Article to a friend
	Bibliographic References
	ASCII Text BibTex RefWorks Procite/RefMan
	Add to:
	Digg Furl Spurl Blink Simpy Google Del.icio.us Y!MyWeb
	Search
	Similar Articles Articles by I. Zine-El-Abidine Articles by M. Okoniewski Articles by J. G. McRory

2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)

Banff, Alberta, Canada

August 25-August 27

ISBN: 0-7695-2189-4

	ASCII Text	x
	I. Zine-El-Abidine, M. Okoniewski, J. G. McRory, "A Tunable RF MEMS Inductor," MEMS, NANO, and Smart Systems, International Conference on, pp. 636-638, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004.

	BibTex	x
	@article{ 10.1109/ICMENS.2004.24, author = {I. Zine-El-Abidine and M. Okoniewski and J. G. McRory}, title = {A Tunable RF MEMS Inductor}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2004}, isbn = {0-7695-2189-4}, pages = {636-638}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.24}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - A Tunable RF MEMS Inductor SN - 0-7695-2189-4 SP636 EP638 A1 - I. Zine-El-Abidine, A1 - M. Okoniewski, A1 - J. G. McRory, PY - 2004 KW - radio frequency KW - MEMS KW - inductor KW - tunable VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

I. Zine-El-Abidine, University of Calgary and TRLabs

M. Okoniewski, University of Calgary and TRLabs

J. G. McRory, University of Calgary and TRLabs

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.24

This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.

Index Terms:

radio frequency, MEMS, inductor, tunable

Citation:

I. Zine-El-Abidine, M. Okoniewski, J. G. McRory, "A Tunable RF MEMS Inductor," icmens, pp.636-638, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004

Peer Review Notice | Give Us Feedback

Usage of this product signifies your acceptance of the Terms of Use.