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2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
Theoretical Calculation of TAM and Correction of Topography
Banff, Alberta, Canada
August 25-August 27
ISBN: 0-7695-2189-4
ASCII Text
x 
 
Sidan Du, Lian Cai, Duntang Gao, "Theoretical Calculation of TAM and Correction of Topography," MEMS, NANO, and Smart Systems, International Conference on, pp. 548-552, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004.
 
 
BibTex
x
 
@article{ 10.1109/ICMENS.2004.145,
author = {Sidan Du and Lian Cai and Duntang Gao},
title = {Theoretical Calculation of TAM and Correction of Topography},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2004},
isbn = {0-7695-2189-4},
pages = {548-552},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2004.145},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Theoretical Calculation of TAM and Correction of Topography
SN - 0-7695-2189-4
SP548
EP552
A1 - Sidan Du,
A1 - Lian Cai,
A1 - Duntang Gao,
PY - 2004
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Sidan Du, Nanjing University
Lian Cai, Nanjing University
Duntang Gao, Nanjing University
A two-sphere system is applied to simulate the electrostatic force between the tip and the sample of tunneling acoustic microscopy (TAM). And theoretical calculation of this electrostatic force is presented. The cause of the distortion of topography obtained by feed back system is analyzed, and a method to correct this distortion is given. With this method, the correction results of two-dimensional and three-dimensional topography are shown, which are valuable and important to the research of metallic tip surface system.
Citation:
Sidan Du, Lian Cai, Duntang Gao, "Theoretical Calculation of TAM and Correction of Topography," icmens, pp.548-552, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004
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