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2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
Parametric Identification of Contact Forces Using AFM
Banff, Alberta, Canada
August 25-August 27
ISBN: 0-7695-2189-4
EihabM. Abdel-Rahman, Virginia Polytechnic Institute and State University
Ali H. Nayfeh, Virginia Polytechnic Institute and State University
We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.
Citation:
EihabM. Abdel-Rahman, Ali H. Nayfeh, "Parametric Identification of Contact Forces Using AFM," icmens, pp.541-547, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004
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