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2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)
A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method
Banff, Alberta, Canada
August 25-August 27
ISBN: 0-7695-2189-4
Jaewoo Lee, Electronics and Telecommunications Research Institute
Woo-Seok Yang, Electronics and Telecommunications Research Institute
Changhee Hyoung, Electronics and Telecommunications Research Institute
Sungweon Kang, Electronics and Telecommunications Research Institute
Chang-Auck Choi, Electronics and Telecommunications Research Institute
A novel π small-signal model of MEMS series switches is presented based on a parameter-extraction method, which can determine a fringing capacitance (C_f) in the end of each signal line as well as a contact resistance (R_c). For an on-state modeling, the average error of S₁₁ for the π model is 5.1% in the range of 5~35 GHz, whereas that of the conventional model of two-port series-impedance without C_f is 167.2 %. It is noted that the conventional model is not valid anymore for the on-state model and C_f should be taken into account. The small-signal modeling by the proposed π model demonstrates the validity of the approach.
Citation:
Jaewoo Lee, Woo-Seok Yang, Changhee Hyoung, Sungweon Kang, Chang-Auck Choi, "A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method," icmens, pp.502-508, 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04), 2004
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