2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)
Nonlinear Effects in MEMS Capacitive Microphone Design
Banff, Alberta, Canada
July 20-July 23
ISBN: 0-7695-1947-4
An analytical method is presented that provides a better approximation for design parameter values of a MEMS capacitive microphone. The spring softening effect associated with the nonlinear characteristics of the electrostatic pressure due to a bias voltage, and the spring hardening effect associated with nonlinear stretching of the central region of a uniformly loaded fully clamped diaphragm with residual stress are both considered. The method allows a more accurate determination of the developed electrostatic pressure, maximum diaphragm deflection and the pull-in voltage. The resulting electrostatic pressure, pull-in voltage and deflection profile of the diaphragm are in close agreement with finite element analysis results.
Index Terms:
MEMS, capacitive microphone, pull-in voltage, nonlinearity, diaphragm deformation, electrostatic force
Citation:
Sazzadur Chowdhury, M. Ahmadi, W. C. Miller, "Nonlinear Effects in MEMS Capacitive Microphone Design," icmens, pp.297, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003