The Washington Technology Center, a state-chartered science and technology organization, headquartered at the University of Washington in Seattle, began its MEMS Initiative in 1997 to build core capabilities at the state?s universities and to foster commercialization of university-developed MEMS technology. Key to the success of the Initiative was establishment of the WTC?s Microfabrication Laboratory a 15,000 sq. ft. user-supported cleanroom facility for academic and industrial MEMS research, development, prototype product manufacturing and foundry processing. Since that time, the Microfab Lab has grown to become the premier MEMS fabrication facility in the Pacific Northwest, with 180 users from 40 academic research groups and 30 private companies, and annual revenues approaching $1 M.

This paper will cover the key success factors and lessons learned in commercializing micro-technology through start-up companies and industry-university partnerships over the past 6 years. The evolution of the Microfabrication Lab, in particular, will be described to illustrate how technical capabilities, laboratory management and business planning were adapted to attract and meet the needs of a growing user base.