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2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)
Transition of MEMS Technology to Nanofabrication
Banff, Alberta, Canada
July 20-July 23
ISBN: 0-7695-1947-4
ASCII Text
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Stephen C. Jakeway, H. John Crabtree, Teodor Veres, Neil S. Cameron, Helge Luesebrink, Thomas Glinsner, "Transition of MEMS Technology to Nanofabrication," MEMS, NANO, and Smart Systems, International Conference on, pp. 118, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.
 
 
BibTex
x
 
@article{ 10.1109/ICMENS.2003.1221977,
author = {Stephen C. Jakeway and H. John Crabtree and Teodor Veres and Neil S. Cameron and Helge Luesebrink and Thomas Glinsner},
title = {Transition of MEMS Technology to Nanofabrication},
journal ={MEMS, NANO, and Smart Systems, International Conference on},
volume = {0},
year = {2003},
isbn = {0-7695-1947-4},
pages = {118},
doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221977},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - MEMS, NANO, and Smart Systems, International Conference on
TI - Transition of MEMS Technology to Nanofabrication
SN - 0-7695-1947-4
SP
EP
A1 - Stephen C. Jakeway,
A1 - H. John Crabtree,
A1 - Teodor Veres,
A1 - Neil S. Cameron,
A1 - Helge Luesebrink,
A1 - Thomas Glinsner,
PY - 2003
KW - null
VL - 0
JA - MEMS, NANO, and Smart Systems, International Conference on
ER -
 
Stephen C. Jakeway, Micralyne, Inc.
H. John Crabtree, Micralyne, Inc.
Teodor Veres, IMI-CNRC
Neil S. Cameron, IMI-CNRC
Helge Luesebrink, EV Group, Inc.
Thomas Glinsner, EV Group, Inc.
The transition of MEMS technology to nano fabrication is a solution to the growing demand for smaller and high-density feature sizes in the nanometer scale. Techniques for fabricating ?m-, and nm-features will be discussed, and results achieved with nanoimprinting technologies will be presented.
Citation:
Stephen C. Jakeway, H. John Crabtree, Teodor Veres, Neil S. Cameron, Helge Luesebrink, Thomas Glinsner, "Transition of MEMS Technology to Nanofabrication," icmens, pp.118, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003
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