RF MEMS Devices

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2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)

RF MEMS Devices

Banff, Alberta, Canada

July 20-July 23

ISBN: 0-7695-1947-4

	ASCII Text	x
	R. R. Mansour, M. Bakri-Kassem, M. Daneshmand, N. Messiha, "RF MEMS Devices," MEMS, NANO, and Smart Systems, International Conference on, pp. 103, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.

	BibTex	x
	@article{ 10.1109/ICMENS.2003.1221974, author = {R. R. Mansour and M. Bakri-Kassem and M. Daneshmand and N. Messiha}, title = {RF MEMS Devices}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2003}, isbn = {0-7695-1947-4}, pages = {103}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221974}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - RF MEMS Devices SN - 0-7695-1947-4 SP EP A1 - R. R. Mansour, A1 - M. Bakri-Kassem, A1 - M. Daneshmand, A1 - N. Messiha, PY - 2003 KW - null VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

R. R. Mansour, University of Waterloo

M. Bakri-Kassem, University of Waterloo

M. Daneshmand, University of Waterloo

N. Messiha, University of Waterloo

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221974

This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS mutiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate MEMS variable capacitors. The MEMS tunable inductor is realized using MEMS fixed inductors, capacitors and a variable MEMS capacitor. The proposed MEMS multiport switch has demonstrated a superior RF performance up to 20 GHz.

Citation:

R. R. Mansour, M. Bakri-Kassem, M. Daneshmand, N. Messiha, "RF MEMS Devices," icmens, pp.103, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003

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