2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)
RF MEMS Switch for Wireless LAN Applications
Banff, Alberta, Canada
July 20-July 23
ISBN: 0-7695-1947-4
Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150?m × 60?m × 0.6?m. The spacing between the top beam and the bottom ground electrode was approximately 1?m. This switch has low pull-in voltage of 15V and fast switching speed of 60?s. An RF performance with >-50dB isolation below 5GHz and <-0.18dB up to 30GHz was observed.
Citation:
Kee-Keun Lee, Bruce C. Kim, "RF MEMS Switch for Wireless LAN Applications," icmens, pp.100, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003
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