RF MEMS Switch for Wireless LAN Applications

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2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03)

Banff, Alberta, Canada

July 20-July 23

ISBN: 0-7695-1947-4

	ASCII Text	x
	Kee-Keun Lee, Bruce C. Kim, "RF MEMS Switch for Wireless LAN Applications," MEMS, NANO, and Smart Systems, International Conference on, pp. 100, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003.

	BibTex	x
	@article{ 10.1109/ICMENS.2003.1221973, author = {Kee-Keun Lee and Bruce C. Kim}, title = {RF MEMS Switch for Wireless LAN Applications}, journal ={MEMS, NANO, and Smart Systems, International Conference on}, volume = {0}, year = {2003}, isbn = {0-7695-1947-4}, pages = {100}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221973}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - MEMS, NANO, and Smart Systems, International Conference on TI - RF MEMS Switch for Wireless LAN Applications SN - 0-7695-1947-4 SP EP A1 - Kee-Keun Lee, A1 - Bruce C. Kim, PY - 2003 KW - null VL - 0 JA - MEMS, NANO, and Smart Systems, International Conference on ER -

Kee-Keun Lee, Arizona State University

Bruce C. Kim, Arizona State University

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICMENS.2003.1221973

Double cantilever beam MEMS switch was developed for wireless LAN applications. The two beams are controlled by a single actuation electrode. The dimension of the fabricated cantilever beam is 150?m × 60?m × 0.6?m. The spacing between the top beam and the bottom ground electrode was approximately 1?m. This switch has low pull-in voltage of 15V and fast switching speed of 60?s. An RF performance with >-50dB isolation below 5GHz and <-0.18dB up to 30GHz was observed.

Citation:

Kee-Keun Lee, Bruce C. Kim, "RF MEMS Switch for Wireless LAN Applications," icmens, pp.100, 2003 International Conference on MEMS, NANO and Smart Systems (ICMENS'03), 2003

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