Software Processes involve many different aspects. Thereby, to represent them in a system can result a difficult task. One way of making this work easier is to establish the different aspects in a conceptual architecture with varying abstraction levels (metamodels, models, metadata, data), which can be specified, designed and constructed independently. The problem that then arises is how to deal suitably with the different abstraction levels. We propose MOF and XMI standards as a solution. This paper describes the advantages of using MOF and XMI to represent software processes. A concrete example is presented using a software process metamodel, which illustrates the basic components of a process software.