A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation

D
DATE
1998
Design Automation and Test in Europe (DATE '98)
Abstract - A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation

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	Similar Articles Articles by R. Neul Articles by U. Becker Articles by G. Lorenz P. Schwarz Articles by J. Haase S. Wünsche

Design Automation and Test in Europe (DATE '98)

Paris, France

February 23-February 26

ISBN: 0-8186-8359-7

	ASCII Text	x
	R. Neul, U. Becker, G. Lorenz P. Schwarz, J. Haase S. Wünsche, "A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation," Design, Automation and Test in Europe Conference and Exhibition, pp. 510, Design Automation and Test in Europe (DATE '98), 1998.

	BibTex	x
	@article{ 10.1109/DATE.1998.655906, author = {R. Neul and U. Becker and G. Lorenz P. Schwarz and J. Haase S. Wünsche}, title = {A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation}, journal ={Design, Automation and Test in Europe Conference and Exhibition}, volume = {0}, year = {1998}, isbn = {0-8186-8359-7}, pages = {510}, doi = {http://doi.ieeecomputersociety.org/10.1109/DATE.1998.655906}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, }

	RefWorks Procite/RefMan/Endnote	x
	TY - CONF JO - Design, Automation and Test in Europe Conference and Exhibition TI - A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation SN - 0-8186-8359-7 SP EP A1 - R. Neul, A1 - U. Becker, A1 - G. Lorenz P. Schwarz, A1 - J. Haase S. Wünsche, PY - 1998 VL - 0 JA - Design, Automation and Test in Europe Conference and Exhibition ER -

R. Neul, Robert Bosch GmbH FhG-IIS/EAS

U. Becker, Robert Bosch GmbH FhG-IIS/EAS

G. Lorenz P. Schwarz, Robert Bosch GmbH FhG-IIS/EAS

J. Haase S. Wünsche, Robert Bosch GmbH FhG-IIS/EAS

DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/DATE.1998.655906

For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occurring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analyzed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.

Citation:

R. Neul, U. Becker, G. Lorenz P. Schwarz, J. Haase S. Wünsche, "A Modeling Approach to Include Mechanical Microsystem Components into the System Simulation," date, pp.510, Design Automation and Test in Europe (DATE '98), 1998

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