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Sixth Asian Test Symposium (ATS'97)
Novel Optical Probing System for Quarter-micron VLSI Circuits
Akita, JAPAN
November 17-November 18
ISBN: 0-8186-8209-4
ASCII Text
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K. Ozaki, H. Sekiguchi, S. Wakana, Y. Goto, Y. Umehara, J. Matsumoto, "Novel Optical Probing System for Quarter-micron VLSI Circuits," Asian Test Symposium, pp. 208, Sixth Asian Test Symposium (ATS'97), 1997.
 
 
BibTex
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@article{ 10.1109/ATS.1997.643960,
author = {K. Ozaki and H. Sekiguchi and S. Wakana and Y. Goto and Y. Umehara and J. Matsumoto},
title = {Novel Optical Probing System for Quarter-micron VLSI Circuits},
journal ={Asian Test Symposium},
volume = {0},
year = {1997},
issn = {1081-7735},
pages = {208},
doi = {http://doi.ieeecomputersociety.org/10.1109/ATS.1997.643960},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - Asian Test Symposium
TI - Novel Optical Probing System for Quarter-micron VLSI Circuits
SN - 1081-7735
SP
EP
A1 - K. Ozaki,
A1 - H. Sekiguchi,
A1 - S. Wakana,
A1 - Y. Goto,
A1 - Y. Umehara,
A1 - J. Matsumoto,
PY - 1997
KW - VLSI Circuits
KW - Internal analysis
KW - Prober
KW - Electro-optic Sampling
KW - Scanning Force Microscope
KW - waveform
KW - DC voltage
VL - 0
JA - Asian Test Symposium
ER -
 
K. Ozaki, Fujitsu Laboratories Ltd.
H. Sekiguchi, Fujitsu Laboratories Ltd.
S. Wakana, Fujitsu Laboratories Ltd.
Y. Goto, Fujitsu Laboratories Ltd.
Y. Umehara, Advantest Corporation
J. Matsumoto, Advantest Corporation
An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-micron VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-micron spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers.
Index Terms:
VLSI Circuits, Internal analysis, Prober, Electro-optic Sampling, Scanning Force Microscope, waveform, DC voltage
Citation:
K. Ozaki, H. Sekiguchi, S. Wakana, Y. Goto, Y. Umehara, J. Matsumoto, "Novel Optical Probing System for Quarter-micron VLSI Circuits," ats, pp.208, Sixth Asian Test Symposium (ATS'97), 1997
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