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ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis
July/August 2007 (vol. 24 no. 4)
pp. 352-361
| ASCII Text | x | ||
| Federico Di Palma, Giuseppe De Nicolao, Guido Miraglia, Oliver M. Donzelli, "ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis," IEEE Design & Test of Computers, vol. 24, no. 4, pp. 352-361, July/August, 2007. | |||
| BibTex | x | ||
| @article{ 10.1109/MDT.2007.119, author = {Federico Di Palma and Giuseppe De Nicolao and Guido Miraglia and Oliver M. Donzelli}, title = {ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis}, journal ={IEEE Design & Test of Computers}, volume = {24}, number = {4}, issn = {0740-7475}, year = {2007}, pages = {352-361}, doi = {http://doi.ieeecomputersociety.org/10.1109/MDT.2007.119}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - MGZN JO - IEEE Design & Test of Computers TI - ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis IS - 4 SN - 0740-7475 SP352 EP361 EPD - 352-361 A1 - Federico Di Palma, A1 - Giuseppe De Nicolao, A1 - Guido Miraglia, A1 - Oliver M. Donzelli, PY - 2007 KW - AC/ID methodology KW - semiconductor manufacturing KW - fault diagnosis KW - electrical sort test KW - commonality analysis KW - pattern recognition KW - statistical methods VL - 24 JA - IEEE Design & Test of Computers ER - | |||
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/MDT.2007.119
Process diagnosis is critical to the semiconductor industry. Early detection of faulty process steps can dramatically reduce business losses and accelerate the development cycle of new products. This article proposes a novel methodology called AC/ID (automatic classification/interactive diagnosis) that can isolate the root causes of yield loss by combining end-of-line tests (such as wafer sort test) with process history information. The authors have automated the AC/ID methodology in a software tool, ACID (Automatic Classification for Interactive Design), which is fully operational at industrial production sites.
Index Terms:
AC/ID methodology, semiconductor manufacturing, fault diagnosis, electrical sort test, commonality analysis, pattern recognition, statistical methods
Citation:
Federico Di Palma, Giuseppe De Nicolao, Guido Miraglia, Oliver M. Donzelli, "ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis," IEEE Design & Test of Computers, vol. 24, no. 4, pp. 352-361, July-Aug. 2007, doi:10.1109/MDT.2007.119
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