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| M. Tichem, M.S. Cohen, "Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision," IEEE Transactions on Pattern Analysis and Machine Intelligence, vol. 16, no. 8, pp. 791-794, August, 1994. | |||
| BibTex | x | ||
| @article{ 10.1109/34.308473, author = {M. Tichem and M.S. Cohen}, title = {Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision}, journal ={IEEE Transactions on Pattern Analysis and Machine Intelligence}, volume = {16}, number = {8}, issn = {0162-8828}, year = {1994}, pages = {791-794}, doi = {http://doi.ieeecomputersociety.org/10.1109/34.308473}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - JOUR JO - IEEE Transactions on Pattern Analysis and Machine Intelligence TI - Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision IS - 8 SN - 0162-8828 SP791 EP794 EPD - 791-794 A1 - M. Tichem, A1 - M.S. Cohen, PY - 1994 KW - computer vision; optical microscopy; optical workshop techniques; optical fibres; semiconductor lasers; sub/spl mu/m registration; fiducial marks; machine vision; circularly symmetric fiducial marks; centroids; distributed edge positions; second-derivative zero-crossing method; diffraction fringes; microscope optical axis; laser-fibre alignment tolerance VL - 16 JA - IEEE Transactions on Pattern Analysis and Machine Intelligence ER - | |||
Sub/spl mu/m registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies.
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