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Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision
August 1994 (vol. 16 no. 8)
pp. 791-794

Sub/spl mu/m registration between circularly symmetric fiducial marks can be achieved simply by finding their centroids by fitting circles to distributed edge positions determined by the second-derivative zero-crossing method. However, because of diffraction fringes, substantial errors originating in the tilt of the microscope optical axis must be minimized. This method is used for laser-fibre alignment tolerance studies.

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Index Terms:
computer vision; optical microscopy; optical workshop techniques; optical fibres; semiconductor lasers; sub/spl mu/m registration; fiducial marks; machine vision; circularly symmetric fiducial marks; centroids; distributed edge positions; second-derivative zero-crossing method; diffraction fringes; microscope optical axis; laser-fibre alignment tolerance
Citation:
M. Tichem, M.S. Cohen, "Sub/spl mu/m Registration of Fiducial Marks Using Machine Vision," IEEE Transactions on Pattern Analysis and Machine Intelligence, vol. 16, no. 8, pp. 791-794, Aug. 1994, doi:10.1109/34.308473
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