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Issue No.02 - April-June (2010 vol.3)
pp: 88-97
Jérémy Streque , Joint International Laboratory LEMAC: Institute of Electronics, Microelectronics and Nanotechnology (IEMN-UMR CNRS), Villeneuve d'Ascq
Abdelkrim Talbi , Joint International Laboratory LEMAC: Institute of Electronics, Microelectronics and Nanotechnology (IEMN-UMR CNRS), Villeneuve d'Ascq
Philippe Pernod , Joint International Laboratory LEMAC: Institute of Electronics, Microelectronics and Nanotechnology (IEMN-UMR CNRS), Villeneuve d'Ascq
Vladimir Preobrazhensky , Joint International Laboratory LEMAC: Institute of Electronics, Microelectronics and Nanotechnology, Villeneuve d'Ascq and Wave Research Center of Prokhorov General Physics Institute, RAS
ABSTRACT
Highly efficient tactile display devices must fulfill technical requirements for tactile stimulation, all the while preserving the lightness and compactness needed for handheld operation. This paper focuses on the elaboration of highly integrated magnetic microactuators for tactile display devices. FEM simulation, conception, fabrication, and characterization of these microactuators are presented in this paper. The current demonstrator offers a 4 × 4 flexible microactuator array with a resolution of 2 mm. Each actuator is composed of a Poly (Dimethyl-Siloxane) (PDMS) elastomeric membrane, magnetically actuated by coil-magnet interaction. It represents a proof of concept for fully integrated MEMS tactile devices, with fair actuation forces provided for a power consumption up to 100 mW per microactuator. The prototypes are destined to provide both static and dynamic tactile sensations, with an optimized membrane geometry for actuation frequencies between DC and 350 Hz. On the basis of preliminary experiments, this display device can offer skin stimulations for various tactile stimuli for applications in the fields of Virtual Reality or Human-Computer Interaction (HCI). Moreover, the elastomeric material used in this device and its global compactness offer great advantages in matter of comfort of use and capabilities of integration in haptic devices.
INDEX TERMS
Actuators, MEMS, micromagnetomechanical systems (MMMS), tactile display, magnetic actuation.
CITATION
Jérémy Streque, Abdelkrim Talbi, Philippe Pernod, Vladimir Preobrazhensky, "New Magnetic Microactuator Design Based on PDMS Elastomer and MEMS Technologies for Tactile Display", IEEE Transactions on Haptics, vol.3, no. 2, pp. 88-97, April-June 2010, doi:10.1109/TOH.2009.61
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