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Modeling Defect Spatial Distribution
April 1989 (vol. 38 no. 4)
pp. 538-546
The center-satellite model for describing the distribution of defects on wafers is discussed. This model assigns each defect to a cluster. The distribution of cluster centers on a wafer is one basic component of the model. The other basic component is the distribution of defects (satellites) about the cluster centers. Physical justification for the model is provided. Current yield models are qu

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Index Terms:
defect spatial distribution modelling; center-satellite model; wafers; cluster; yield models; redundancy techniques; WSI; fault-tolerant designs; circuit CAD; fault tolerant computing; VLSI.
F.J. Meyer, D.K. Pradhan, "Modeling Defect Spatial Distribution," IEEE Transactions on Computers, vol. 38, no. 4, pp. 538-546, April 1989, doi:10.1109/12.21146
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