This Article 
   
 Share 
   
 Bibliographic References 
   
 Add to: 
 
Digg
Furl
Spurl
Blink
Simpy
Google
Del.icio.us
Y!MyWeb
 
 Search 
   
Modeling Defect Spatial Distribution
April 1989 (vol. 38 no. 4)
pp. 538-546
The center-satellite model for describing the distribution of defects on wafers is discussed. This model assigns each defect to a cluster. The distribution of cluster centers on a wafer is one basic component of the model. The other basic component is the distribution of defects (satellites) about the cluster centers. Physical justification for the model is provided. Current yield models are qu

[1] R. S. Burington,Handbook of Mathematical Tables and Formulas. Sandusky, OH: Handbook Publishers, 1933.
[2] J. Burkill,The Lebesgue Integral. Cambridge, England: University Press, 1953.
[3] A. Cliff and J. Ord,Spatial Processes: Models and Applications. London, England: Pion, 1981.
[4] W. Feller, "On a general class of 'contagious' distributions,"Ann. Math. Stat., vol. 14, pp. 389-400, 1943.
[5] A. V. Ferris-Prabhu, "Modeling the critical area in yield forecasts,"IEEE J. Solid-State Circuits, vol. SC-20, pp. 874-878, Aug. 1985.
[6] A. Gupta, W. A. Porter, and J. A. Lathrop, "Defect analysis and yield degradation of integrated circuits,"IEEE J. Solid-State Circuits, vol. SC-9, pp. 96-102, June 1974.
[7] E. Horowitz and A. Zorat, "The binary tree as an interconnection network: Applications to multiprocessor systems and VLSI,"IEEE Trans. Comput., vol. C-30, pp. 247-253, Apr. 1981.
[8] S. Kotz and N. L. Johnson,Encyclopedia of Statistical Sciences. New York: Wiley, 1982.
[9] F. J. Meyer and D. K. Pradhan, "The center-satellite model: A WSI-ready model of spatial dispersion," Tech. Rep., Dep. Elec. Comput. Eng., Univ. of Massachusetts, Amherst, MA, Nov. 1988.
[10] H. Mughal, W. Eccleston, and R. Stuart, "Spatial distribution of defects in SiO2,"Electron. Lett., vol. 14, pp. 761-762, Nov. 23, 1978.
[11] B. T. Murphy, "Cost-size optima for monolithic integrated circuits,"Proc. IEEE, vol. 52, pp. 1537-1545, Dec. 1964.
[12] J. Neyman, "On a new class of 'contagious' distributions applicable in entomology and bacteriology,"Ann. Math. Stat., vol. 10, pp. 35-57, 1939.
[13] O. Paz and T. L. Lawson, "Modification of Poisson statistics: Modeling defects induced by diffusion,"IEEE J. Solid-State Circuits, vol. SC-12, pp. 540-546, Oct. 1977.
[14] C. Stapper, "Modeling of defects in integrated circuit photolithographic patterns,"IBM J. Res. Develop., vol. 28, pp. 461-475, July 1984.
[15] C. Stapper, "Yield model for fault clusters within integrated circuits,"IBM J. Res. Develop., vol. 28, pp. 636-640, Sept. 1984.
[16] C. Stapper, "The effects of wafer to wafer defect density variations on integrated circuity defect and fault distributions,"IBM J. Res. Develop., vol. 29, pp. 87-97, Jan. 1985.
[17] C. H. Stapper, "On yield, fault distributions and clustering of particles,"IBM J. Res. Develop., vol. 30, no. 3, pp. 326-338, May 1986.
[18] C. H. Stapper, "Correlation analysis of particle clusters on integrated circuit wafers,"IBM J. Res. Develop., vol. 31, pp. 641-650, Nov. 1987.
[19] C. H. Stapper, F. M. Armstrong, and K. Saji, "Integrated circuit yield statistics,"Proc. IEEE, vol. 71, pp. 453-470, Apr. 1983.
[20] R. M. Warner, Jr., "Applying a composite model to the IC yield problem,"IEEE J. Solid-State Circuits, vol. SC-9, pp. 86-95, June 1974.
[21] W. Warren, "The center-satellite concept as a basis for ecological sampling,"Stat. Ecol., vol. 2, pp. 87-118, 1971.
[22] T. Yanagawa, "Yield degradation of integrated circuits due to spot defects,"IEEE Trans. Electron. Devices, vol. ED-19, pp. 190-197, Feb. 1972.

Index Terms:
defect spatial distribution modelling; center-satellite model; wafers; cluster; yield models; redundancy techniques; WSI; fault-tolerant designs; circuit CAD; fault tolerant computing; VLSI.
Citation:
F.J. Meyer, D.K. Pradhan, "Modeling Defect Spatial Distribution," IEEE Transactions on Computers, vol. 38, no. 4, pp. 538-546, April 1989, doi:10.1109/12.21146
Usage of this product signifies your acceptance of the Terms of Use.