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International Conference on Nano/Micro Engineered and Molecular Systems (2009)
Shenzhen, China
Jan. 5, 2009 to Jan. 8, 2009
ISBN: 978-1-4244-4629-2
TABLE OF CONTENTS
Papers
Lidong Du , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Zhan Zhao , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Cheng Pang , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Zhen Fang , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Yonghong Liu , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China
Youjun Han , Institute of Meteorology, PLA University of Science&Technology, Nanjing 211101, China
pp. 1-4
Haitao Ding , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Zhenchuan Yang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Guizhen Yan , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 5-8
Yu Ling-min , School of electronic and information Engineering, Xi'an Jiao Tong University, China
Zhu Chang-chun , School of electronic and information Engineering, Xi'an Jiao Tong University, China
pp. 9-12
Shubin Yan , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Yingzhan Yan , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Zhe Ji , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Baohua Wang , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Shaohui Wang , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Guoqing Jiang , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Jijun Xiong , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
Xiongying Ye , State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, China
Zhaoying Zhou , State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, China
Wendong Zhang , National Key Laboratory For Electronic Measurement Technology, North University Of China, China
pp. 13-16
Xingli Zhang , Harbin Institute of Technology, Research Center of Satellite technology, China
Zhaowei Sun , Harbin Institute of Technology, Research Center of Satellite technology, China
Guoqiang Wu , Harbin Institute of Technology, Research Center of Satellite technology, China
pp. 17-20
Xudong Zou , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
Kenle Chen , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
Hualiang Zhang , ECE Department, University of Arizona, 1230 E. Speedway Blvd., Tucson, 85721, USA
Jinwen Zhang , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
pp. 21-24
Dong-Ming Fang , Institute of Microelectronics, Peking University, Beijing, China
Hai-Xia Zhang , Institute of Microelectronics, Peking University, Beijing, China
Xiao-Lin Zhao , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
pp. 25-28
Shao-Chun Sun , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
Geng-Chen Shi , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
pp. 33-36
Jinghui Xu , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Weizheng Yuan , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Honglong Chang , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Binghe Ma , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
pp. 37-40
Michael Kraft , School of Electronics and Computer Science, Southampton University, UK
Haitao Ding , Institute of Microelectronics, Peking University, China
pp. 41-46
Hao Ruican , School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, China
Li Decai , School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, China
pp. 47-50
Zhaoxin Geng , Institute of Microelectronics, Peking University, Beijing, China
Qing Li , School of Sciences, Changchun University of Science and Technology, China
Wei Wang , Institute of Microelectronics, Peking University, Beijing, China
Zhihong Li , Institute of Microelectronics, Peking University, Beijing, China
pp. 51-54
Bian Tian , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Yulong Zhao , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Zhuangde Jiang , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Ling Zhang , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Nansheng Liao , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Yuanhao Liu , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
Chao Meng , State Key Laboratory for Mechanical Manufacturing System, Institute of Precision Engineering, Xi'an, Jiaotong University, 710049, China
pp. 55-58
Kai Yang , Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China
Zhigang Li , Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China
Yupeng Jing , Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China
Dapeng Chen , Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China
Tianchun Ye , Lab of Silicon Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, China
pp. 59-62
Nor Zaidi Haron , Computer Engineering Laboratory, Delft University of Technology, Mekelweg 4, 2628 CD, the Netherlands
Said Hamdioui , Computer Engineering Laboratory, Delft University of Technology, Mekelweg 4, 2628 CD, the Netherlands
Sorin Cotofana , Computer Engineering Laboratory, Delft University of Technology, Mekelweg 4, 2628 CD, the Netherlands
pp. 63-68
Tsung-Han Tsai , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Dar-Sun Liou , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Ping-Hei Chen , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Chin-Ting Yang , Department of Mechanical and Computer-aided Engineering, St. John's University, Taipei, Taiwan
pp. 69-74
Tao Chen , State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA
Liguo Chen , State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA
Baixu Liu , State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA
Jiachou Wang , State Key Laboratory of Robotics and System, Robotics Institute, Harbin Institute of Technology, 150080, CHINA
Xinxin Li , State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, CHINA
pp. 75-79
Fengtian Han , Department of precision instruments and mechanology, Tsinghua University, China
Zhenbin Fu , Department of precision instruments and mechanology, Tsinghua University, China
Jingxin Dong , Department of precision instruments and mechanology, Tsinghua University, China
pp. 80-85
Yibin Gong , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Huamin Gao , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Xiang Liu , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Wenping Liu , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Tie Li , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Ping Zhou , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Yuelin Wang , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
pp. 86-89
Min Miao , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Yufeng Jin , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Hongguang Liao , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Liwei Zhao , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Yunhui Zhu , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Xin Sun , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
Yunxia Guo , National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, 100871, China
pp. 90-93
Julien Arcamone , CNM-IMB, Campus UAB, 08193 Bellaterra (Barcelona), Spain
Marc Sansa , CNM-IMB, Campus UAB, 08193 Bellaterra (Barcelona), Spain
Jaume Verd , Dept. Enginyeria Electronica. Universitat Autónoma de Barcelona. ETSE-UAB., 08193 Bellaterra, Spain
Arantxa Uranga , Dept. Enginyeria Electronica. Universitat Autónoma de Barcelona. ETSE-UAB., 08193 Bellaterra, Spain
Gabriel Abadal , Dept. Enginyeria Electronica. Universitat Autónoma de Barcelona. ETSE-UAB., 08193 Bellaterra, Spain
Nuria Barniol , Dept. Enginyeria Electronica. Universitat Autónoma de Barcelona. ETSE-UAB., 08193 Bellaterra, Spain
Marc A.F. van den Boogaart , Microsystems Laboratory (LMIS1), EPFL, CH-1015 Lausanne, Switzerland
Juergen Brugger , Microsystems Laboratory (LMIS1), EPFL, CH-1015 Lausanne, Switzerland
Francesc Perez-Murano , CNM-IMB, Campus UAB, 08193 Bellaterra (Barcelona), Spain
pp. 94-97
X. Chen , State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, 100190 Beijing, China
D. F. Cui , State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, 100190 Beijing, China
L.L. Zhang , State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, 100190 Beijing, China
pp. 98-101
Hai Liu , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nano Scien
Xiaohang Chen , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nano Scien
Dong Xu , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nano Scien
Zhongyu Hou , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nano Scien
Yafei Zhang , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro/Nano Scien
pp. 102-105
Wenli Zhou , Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan, China
Sanping Wan , Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan, China
Chao Zhu , School of Chemistry and Environment Engineering, Jianghan University, Wuhan, China
pp. 106-111
Tan D. Tran , MEMS and Microsystems Department, College of Technology, VNUH, VIETNAM
Minh D. Nguyen , Inorganic Materials Science, MESA+ Institute for Nanotechnology, University of Twente, NETHERLANDS
Long T. Nguyen , MEMS and Microsystems Department, College of Technology, VNUH, VIETNAM
Tue H. Huynh , Bac Ha International University, VIETNAM
Thuy P. Nguyen , MEMS and Microsystems Department, College of Technology, VNUH, VIETNAM
pp. 112-115
Haibo Yu , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Niandong Jiao , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Zaili Dong , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Yanli Qu , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Wen J. Li , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Yuechao Wang , Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, China
pp. 116-120
Haijun Zhang , College of Electrical Engineering, Zhejiang University, China
Changsheng Zhu , College of Electrical Engineering, Zhejiang University, China
Qin Yang , College of Mechanical-Electrical Engineering, Jiaxing University, China
pp. 121-125
Liqiang Xie , College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, China
Dingbang Xiao , College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, China
Haoxu Wang , College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, China
Xuezhong Wu , College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, China
Shengyi Li , College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, China
pp. 126-129
Yi Liu , MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
Yaquan Tang , MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
Xiaomei Yu , MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
pp. 130-133
Dong Ying , Department of Precision Instruments and Mechanology, Tsinghua University, China
Gao Wei , Department of Precision Instruments and Mechanology, Tsinghua University, China
You Zheng , Department of Precision Instruments and Mechanology, Tsinghua University, China
pp. 134-138
Haitao Cheng , State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
Heng Yang , State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
Yuelin Wang , State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
pp. 139-142
Hua Sun , College of Automation, Harbin Engineering University, China
Haixu Zhou , College of Automation, Harbin Engineering University, China
Xiang Li , College of Automation, Harbin Engineering University, China
Yanhui Wei , College of Automation, Harbin Engineering University, China
Xiao Li , College of Automation, Harbin Engineering University, China
pp. 143-146
Huiqi He , Bioengineering Graduate Program, The Hong Kong University of Science and Technology, Hong Kong
Donald C. Chang , Dept of Biology, The Hong Kong University of Science and Technology, Hong Kong
Yi-Kuen Lee , Dept of Mechanical Engineering, The Hong Kong University of Science and Technology, Hong Kong
pp. 147-151
Kenle Chen , National key laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Yueyang Dai , School of software and microelectronics, Peking University, Beijing 100871, China
Xudong Zou , National key laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Jinwen Zhang , National key laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 152-155
Lingyun Wang , Dept. of Mechanical and Electrical Engineering, Xiamen Univ., Fujian, CHINA
Yibo Zeng , Dept. of Mechanical and Electrical Engineering, Xiamen Univ., Fujian, CHINA
Wenwang Li , Dept. of Mechanical and Electrical Engineering, Xiamen Univ., Fujian, CHINA
Daoheng Sun , Dept. of Mechanical and Electrical Engineering, Xiamen Univ., Fujian, CHINA
pp. 156-159
Qijun Xiao , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
Wenyuan Chen , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
Gaoyin Ma , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
Feng Cui , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
Shengyong Li , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
Weiping Zhang , Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, China
pp. 160-163
Jia-Hong Zhang , Key Laboratory of MEMS of Ministry of Education, Southeast University, China
Qing-An Huang , Key Laboratory of MEMS of Ministry of Education, Southeast University, China
Hong Yu , Key Laboratory of MEMS of Ministry of Education, Southeast University, China
pp. 164-167
Chi-Yuan Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Shuo-Jen Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Yuh-Chung Hu , Department of Mechanical and Electro-Mechanical Engineering, National ILan University, Taiwan, R.O.C.
Chen-Hen Lin , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Yu-Ming Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Wei-Yuan Fan , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
pp. 168-171
Chi-Yuan Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Shuo-Jen Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Wen-Pin Shih , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.
Chen-Hen Lin , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Chi-Chung Chang , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Pei-Zen Chang , Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan, R.O.C.
pp. 172-175
Siva Penmetsa , Institute for Micromanufacturing, Louisiana Tech University, USA
Tianhua Zhang , Institute for Micromanufacturing, Louisiana Tech University, USA
Zhongcheng Gong , Institute for Micromanufacturing, Louisiana Tech University, USA
Tae-woo Lee , Center for Computation Technology, Louisiana State University, USA
Long Que , Institute for Micromanufacturing, Louisiana Tech University, USA
pp. 176-180
Tianhua Zhang , Institute for Micromanufacturing, Louisiana Tech University, USA
Zhongcheng Gong , Institute for Micromanufacturing, Louisiana Tech University, USA
Long Que , Institute for Micromanufacturing, Louisiana Tech University, USA
pp. 181-184
Wang Ya-Zhou , Department of Applied Chemistry, School of Science, Northwestern Polytechnical University, Xi'an 710072, China
Chen Li-Xin , Department of Applied Chemistry, School of Science, Northwestern Polytechnical University, Xi'an 710072, China
Song Jia-Le , Department of Applied Chemistry, School of Science, Northwestern Polytechnical University, Xi'an 710072, China
pp. 185-189
Hai-feng Zhang , MEMS Center, Harbin Institute of Technology, 150001, China
Xiao-wei Liui , MEMS Center, Harbin Institute of Technology, 150001, China
Zhi-cheng Peng , MEMS Center, Harbin Institute of Technology, 150001, China
Xi-Lian Wang , MEMS Center, Harbin Institute of Technology, 150001, China
Wei Wang , MEMS Center, Harbin Institute of Technology, 150001, China
Yu-feng Chen , No 1 flight college of Air Force, Harbin, 150048, China
pp. 190-193
Xiuling Zhang , Department of Chemistry, Dezhou University, 253011, China
Feng Jin , Department of Physics, Dezhou University, 253011, China
Jianxin Xing , Department of Biology, Dezhou University, 253011, China
pp. 194-197
Xuejiao Fan , Institute of Microelectronics, Peking University, Beijing 100871, China
Dacheng Zhang , Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 198-201
Pingan Zhao , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
Yinqing Li , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
Xiangyu Zeng , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
Jia Zhou , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
Yiping Huang , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
Ran Liu , ASIC and System State Key Lab, Department of Microelectronics, Fudan University, China
pp. 202-205
Weihua Li , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Wenzhong Lou , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Xin Li , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Rongsen Hong , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Liang Hu , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
pp. 206-210
Wei-Hsin Gau , Department of Mechatronic Engineering, Huafan University, Taiwan
Shin-Chun Huang , Department of Mechatronic Engineering, Huafan University, Taiwan
Yuh-Chung Hu , Department of Mechanical and Electro-Mechanical Engineering, Ilan University, Taiwan
pp. 211-214
Xu Zhao , Inst. of Robotics and Automatic Information System, Nankai University, Tianjin, China
Xin Zhao , Inst. of Robotics and Automatic Information System, Nankai University, Tianjin, China
Guizhang Lu , Inst. of Robotics and Automatic Information System, Nankai University, Tianjin, China
pp. 215-218
Chen-Hsun Weng , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan 701
Chih-Chia Huang , Department of Chemistry, National Cheng Kung University, Tainan, Taiwan 701
Chen-Sheng Yeh , Department of Chemistry, National Cheng Kung University, Tainan, Taiwan 701
Gwo-Bin Lee , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan 701
pp. 219-222
Dar-Bin Shieh , Institute of Oral Medicine and Center for Micro/Nano Science and Technology and Institute of Basic Medical Sciences, National Cheng Kung University, Tainan, Taiwan
Chia-Chun Hsieh , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
Song-Bin Huang , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
Gwo-Bin Lee , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
pp. 223-226
Sung-Yi Yang , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
Fong-Yu Cheng , Department of Chemistry, National Cheng Kung University, Tainan, Taiwan
Chen-Sheng Yeh , Department of Chemistry, National Cheng Kung University, Tainan, Taiwan
Huan-Yao Lei , Department of Microbiology and Immunology, National Cheng Kung University, Tainan, Taiwan
Gwo-Bin Lee , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
pp. 227-230
Song Xing , Key Lab of Fundamental Science for National Defense, School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, China
Dong Haifeng , Key Lab of Fundamental Science for National Defense, School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, China
Fang Jiancheng , Key Lab of Fundamental Science for National Defense, School of Instrument Science and Opto-electronics Engineering, Beijing University of Aeronautics and Astronautics, China
pp. 231-234
Liang Hu , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Wen-zhong Lou , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Renlong Song , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Chao Gao , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Xin Li , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
pp. 235-237
Yang Yang , Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China
Jing Liu , Graduate School of Chinese Academy of Sciences, Beijing, China
pp. 238-243
Yang Yang , Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China
Jing Liu , Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China
pp. 244-248
Chi-Chang Lin , Institute of Biomedical Engineering, Tainan 701, Taiwan
Chen-Yuan Yu , Institute of Biomedical Engineering, Tainan 701, Taiwan
Ying-Mei Yang , Institute of Biomedical Engineering, Tainan 701, Taiwan
Yung-Ming Chu , Institute of Biomedical Engineering, Tainan 701, Taiwan
Hong-Ping Lin , Department of Chemistry, Tainan 701, Taiwan
Hsien-Chang Chang , Institute of Biomedical Engineering, Tainan 701, Taiwan
pp. 249-252
Jianbing Xie , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China
Weizheng Yuan , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China
Honglong Chang , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an, China
pp. 253-256
Yunhuan Zheng , Nano Technology Laboratory, Shanghai Institute of Microsystem and Information Technology, China
Jianzhang Wu , Nano Technology Laboratory, Shanghai Institute of Microsystem and Information Technology, China
Jianbo Shao , Nano Technology Laboratory, Shanghai Institute of Microsystem and Information Technology, China
Qinghui Jin , Nano Technology Laboratory, Shanghai Institute of Microsystem and Information Technology, China
Jianlong Zhao , Nano Technology Laboratory, Shanghai Institute of Microsystem and Information Technology, China
pp. 257-260
Wenzhong LOU , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Renlong SONG , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Yunjian Liu , System Engineering Research Institute of Engineering Equipment, 100081 Beijing, China
Xiaosong Liu , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Weihua Li , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
Wanfeng Lin , National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, 100081, China
pp. 261-264
Zhigang Che , State Key Laboratory of Digital Manufacturing Equipment&Technology, Huazhong University of Science&Technology, Wuhan, China
Liangcai Xiong , State Key Laboratory of Digital Manufacturing Equipment&Technology, Huazhong University of Science&Technology, Wuhan, China
Tielin Shi , State Key Laboratory of Digital Manufacturing Equipment&Technology, Huazhong University of Science&Technology, Wuhan, China
Zirong Tang , State Key Laboratory of Digital Manufacturing Equipment&Technology, Huazhong University of Science&Technology, Wuhan, China
Huayang Cheng , State Key Laboratory of Digital Manufacturing Equipment&Technology, Huazhong University of Science&Technology, Wuhan, China
Likun Yang , Wuhan Huagong Laser Engineering Co., Ltd, Wuhan, China
pp. 265-269
Cheng Pang , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Zhan Zhao , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Jiangang Zhang , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Li Shi , Graduate University of Chinese Academy of Sciences, Beijing 100039, China
Lidong Du , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Zhen Fang , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
Yonghong Liu , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
pp. 270-273
C.K. Chung , Dep't of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan, ROC
W.T. Chang , Dep't of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan, ROC
pp. 274-277
Zhongcheng Gong , Institute for Micromanufacturing, Louisiana Tech University, USA
Krithika Nagarajan , School of Biological Science, Louisiana Tech University, USA
Siva Penmetsa , Institute for Micromanufacturing, Louisiana Tech University, USA
David Mills , Institute for Micromanufacturing, Louisiana Tech University, USA
Long Que , Institute for Micromanufacturing, Louisiana Tech University, USA
pp. 278-281
Gaoyin Ma , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
Wenyuan Chen , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
Qijun Xiao , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
Weiping Zhang , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
Feng Cui , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
Kai Li , National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, Research Institute of Micro/Nan
pp. 282-285
Yan Cui , Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, China
Huilin Chen , Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, China
Jinsong Xia , Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, China
Jiaxin Zhao , Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, China
Jing Wang , School of Electron and information Engineering, Dalian University of Technology, China
Liding Wang , Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, China
pp. 286-290
Yipeng Lu , Shanghai Jiaotong University, China
Weiping Zhang , Shanghai Jiaotong University, China
Xiaosheng Wu , Shanghai Jiaotong University, China
Wenyuan Chen , Shanghai Jiaotong University, China
Feng Cui , Shanghai Jiaotong University, China
pp. 291-294
Sun Jizhou , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
Bian Chao , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
Qu Lan , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
Xia Shanhong , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
pp. 295-298
Zhuangde Jiang , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Fengxia Zhao , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Weixuan Jing , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Philip D. Prewett , School of Mechanical Engineering, University of Birmingham, Edgbaston, UK
Kyle Jiang , School of Mechanical Engineering, University of Birmingham, Edgbaston, UK
pp. 299-303
Xiaosheng Wu , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Wenyuan Chen , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Weiping Zhang , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Yipeng Lu , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Feng Cui , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Xiaolin Zhao , Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
pp. 304-309
Yinhong Dai , Dept. of Mechanical and Electrical Engineering, Xiamen University, China, 361005
Donghang Chen , Dept. of Mechanical and Electrical Engineering, Xiamen University, China, 361005
Lingyun Wang , Dept. of Mechanical and Electrical Engineering, Xiamen University, China, 361005
Daoheng Sun , Dept. of Mechanical and Electrical Engineering, Xiamen University, China, 361005
pp. 310-313
Yu-Cheng Ou , Department of Mechanical&Electro-Mechanical Engineering, Tamkang University, Tamsui, Taiwan
Chih-Wen Hsu , Department of Mechanical&Electro-Mechanical Engineering, Tamkang University, Tamsui, Taiwan
Lung-Jieh Yang , Department of Mechanical&Electro-Mechanical Engineering, Tamkang University, Tamsui, Taiwan
Hsieh-Cheng Han , Institute of Microbiology and Biochemistry, National Taiwan University, Taiwan
Yi-Wen Liu , Institute of Microbiology and Biochemistry, National Taiwan University, Taiwan
Chien-Yuan Chen , Institute of Microbiology and Biochemistry, National Taiwan University, Taiwan
pp. 314-318
Chenying Yang , School of Public Health, Peking University Health Science Centre, Beijing, 100191, China
Wei Wang , Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China
Zhihong Li , Institute of Microelectronics, National Key Laboratory of Micro/Nano Fabri-cation Technology, Beijing, 100871, China
pp. 319-322
Jing Wang , School of Science, Dalian Fisheries University, China
Bing Qu , School of Science, Dalian Fisheries University, China
Yan Ming Su , School of Science, Dalian Fisheries University, China
Chao Pan , School of Science, Dalian Fisheries University, China
Wei Guo Cai , School of Science, Dalian Fisheries University, China
pp. 323-326
Ke Tao , Department of Electronic Science and Technology, Nankai University, China
Dexian Zhang , Department of Electronic Science and Technology, Nankai University, China
Yun Sun , Institute of Photo-electronics Thin Film Devices and Technique, Nankai University, China
Linshen Wang , Department of Electronic Science and Technology, Nankai University, China
Jingfang Zhao , Department of Electronic Science and Technology, Nankai University, China
Ying Xue , Department of Electronic Science and Technology, Nankai University, China
Yuanjian Jiang , Department of Electronic Science and Technology, Nankai University, China
Hongkun Cai , Department of Electronic Science and Technology, Nankai University, China
Yanping Sui , Department of Electronic Science and Technology, Nankai University, China
Jin Wang , Department of Electronic Science and Technology, Nankai University, China
pp. 327-330
Jin Wang , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Guofeng Li , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Yiyi Liu , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Yi Lu , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Xianhu Gao , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Yong Zhang , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
Ke Tao , Department of Electronic Science and Technology, Nankai University, Tianjin, China, 300071
pp. 331-334
Yi Jae Lee , Department of Electronic Engineering, Kwangwoon University, Seoul, Korea
Jung Doo Kim , Department of Electronic Engineering, Kwangwoon University, Seoul, Korea
Jae Yeong Park , Department of Electronic Engineering, Kwangwoon University, Seoul, Korea
pp. 335-338
Dingbang Xiao , Laboratory of Microsystem, National University of Defense Technology, China
Liqiang Xie , Laboratory of Microsystem, National University of Defense Technology, China
Zhanqiang Hou , Laboratory of Microsystem, National University of Defense Technology, China
Xuezhong Wu , Laboratory of Microsystem, National University of Defense Technology, China
Shengyi Li , Laboratory of Microsystem, National University of Defense Technology, China
pp. 339-342
Xiuling Ji , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
Yunjian Liu , System Engineering Research Institute of Engineering Equipment, China
Wenzhong Lou , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
pp. 343-347
Kashif Naeem , Department of Urban and Civil Engineering, Shenzhen Graduate School of Harbin Institute of Technology, 518055, China
Ouyang Feng , Department of Urban and Civil Engineering, Shenzhen Graduate School of Harbin Institute of Technology, 518055, China
pp. 348-352
Ping Tang , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Jian Yang , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Jianjun Ye , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Jinyang Zheng , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Chikong Lam , Department of Mechanical Engineering, University of California, Berkeley, 94704, U.S.A.
Ieong Wong , Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, 90095, U.S.A.
Yanbao Ma , Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, 90095, U.S.A.
pp. 353-358
Kuan-Yu Chen , Mechanical&Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan 632
Ju-Nan Kuo , Department of Automation Engineering, National Formosa University, Yunlin, Taiwan 632
pp. 363-366
Guangmei Zhai , Department of Electronic Science and Technology, Huazhong University of Science and Technology, China
Daoli Zhang , Department of Electronic Science and Technology, Huazhong University of Science and Technology, China
Lin Yuan , Department of Electronic Science and Technology, Huazhong University of Science and Technology, China
Jianbing Zhang , Department of Electronic Science and Technology, Huazhong University of Science and Technology, China
pp. 367-370
Jia Hao Zhao , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
Shi Jie Yu , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
Ke Li , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
Ying Dong , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
Qin Zhou , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
Zheng You , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument and Mechanics, Tsinghua University, Beijing, 100084, China
pp. 371-375
Guanggui Cheng , Center of Micro/Nano Sciece and Technology, Jiangsu University, Zhenjiang, China
Jianning Ding , Center of Micro/Nano Sciece and Technology, Jiangsu University, Zhenjiang, China
Biao Kan , Center of Micro/Nano Sciece and Technology, Jiangsu University, Zhenjiang, China
Junziong Wang , Center of Micro/Nano Sciece and Technology, Jiangsu University, Zhenjiang, China
Ningyi Yuan , Institute of Energy, Jiangsu Polytechnic University, Changzhou, China
pp. 376-379
Khashayar Babaei Gavan , Kavli Institute of NanoScience, TU Delft, The Netherlands
Joost van der Heijden , Kavli Institute of NanoScience, TU Delft, The Netherlands
Emile W. J. M. van der Drift , Kavli Institute of NanoScience, TU Delft, The Netherlands
Herre S. J. van der Zant , Kavli Institute of NanoScience, TU Delft, The Netherlands
pp. 380-384
Hung-Chia Lin , Institute of NanoEnineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Yi-Ju Liu , Institute of NanoEnineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
Da-Jeng Yao , Institute of NanoEnineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
pp. 385-389
Fei-Bin Hsiao , National Cheng Kung University, Institute of Nanotechnology and Microsystems Engineering, Taiwan
Yung-Chun Lee , National Cheng Kung University, Institute of Nanotechnology and Microsystems Engineering, Taiwan
Lee Chang Hsiang , National Cheng Kung University, Institute of Nanotechnology and Microsystems Engineering, Taiwan
pp. 390-395
Weiping Chen , MEMS Center, Harbin Institute of Technology, China
Xiaoliang Chen , MEMS Center, Harbin Institute of Technology, China
Guoguang Zheng , MEMS Center, Harbin Institute of Technology, China
Xiaowei Liu , MEMS Center, Harbin Institute of Technology, China
Haifeng Zhang , MEMS Center, Harbin Institute of Technology, China
pp. 396-399
Hamed Sadeghian , Structural Optimization and Computational Mechanics Group, Department of Precision and Microsystems, Delft University of Technology, Netherlands
Chung Kai Yang , Electronic Instrumentation Laboratory, Department of Microelectronics, Delft University of Technology, Netherlands
Khashayar Babaei Gavan , Kavli Institute of Nanoscience, Delft University of Technology, Netherlands
Hans Goosen , Structural Optimization and Computational Mechanics Group, Department of Precision and Microsystems, Delft University of Technology, Netherlands
Emile van der Drift , Kavli Institute of Nanoscience, Delft University of Technology, Netherlands
Here van der Zant , Kavli Institute of Nanoscience, Delft University of Technology, Netherlands
Paddy J. French , Electronic Instrumentation Laboratory, Department of Microelectronics, Delft University of Technology, Netherlands
Andre Bossche , Electronic Instrumentation Laboratory, Department of Microelectronics, Delft University of Technology, Netherlands
Fred van Keulen , Structural Optimization and Computational Mechanics Group, Department of Precision and Microsystems, Delft University of Technology, Netherlands
pp. 400-403
Jinhui Lan , Department of Measurement and Control Technologies, School of Information Engineering, University of Science and Technology Beijing, China
Yuqiao Shi , Department of Measurement and Control Technologies, School of Information Engineering, University of Science and Technology Beijing, China
pp. 404-408
Aimiao Qin , Key laboratory of new processing technology for nonferrous metals and materials, ministry of education, Department of Materials and Chemistry Engineering, Guilin University of Tech
Yuzi Liu , School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332 USA
Zhong Lin Wang , School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332 USA
pp. 409-412
J.N. Ding , Jiangsu Polytechnic University, Changzhou 213016, China
H.S. Qi , Center of Micro and Nano Science and Technology, Jiangsu University, Zhenjiang, China
N.Y. Yuan , Jiangsu Polytechnic University, Changzhou 213016, China
Y.L. He , Jiangsu Polytechnic University, Changzhou 213016, China
G.G. Cheng , Center of Micro and Nano Science and Technology, Jiangsu University, Zhenjiang, China
pp. 413-415
Sen Yao , Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokohama, Japan
Shunji Goto , Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, Yokohama, Japan
Junpei Sakurai , Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan
Tadahiko Shinshi , Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, Japan
Minoru Uehara , Hitachi Metals Ltd., Tokyo, Japan
Hitoshi Yamamoto , Hitachi Metals Ltd., Tokyo, Japan
pp. 416-419
Zongwei Niu , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Zhiyong Li , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Li Li , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Rongguo Hou , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
pp. 420-423
Zongwei Niu , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Zhiyong Li , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Li Li , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
Rongguo Hou , School of Mechanical Engineering, Shandong University of Technology, Zibo, 255049, China
pp. 424-427
Gang Zhao , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Wen Li , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Guanrong Tang , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Jing Chen , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
pp. 428-431
Yue Chen , MEMS Research Center, Institute of Microelectronics, Peking University, China, 100871
Xiuhan Li , School of Electronics and Information Engineering, Beijing Jiaotong University, China, 100044
Dongming Fang , MEMS Research Center, Institute of Microelectronics, Peking University, China, 100871
Quan Yuan , MEMS Research Center, Institute of Microelectronics, Peking University, China, 100871
Haixia Zhang , MEMS Research Center, Institute of Microelectronics, Peking University, China, 100871
pp. 432-435
Jinxing Wang , Institute of Electronic Materials and Devices, Hannover Leibniz University, Germany
Apurba Laha , Institute of Electronic Materials and Devices, Hannover Leibniz University, Germany
Andreas Fissel , Information Technology Laboratory, Hannover Leibniz University, Germany
Dominik Schwendt , Institute of Electronic Materials and Devices, Hannover Leibniz University, Germany
Rytis Dargis , Information Technology Laboratory, Hannover Leibniz University, Germany
Tatsuro Watahiki , Paul-Drude-Institut für Festkörperelektronik, Germany
Roman Shayduk , Paul-Drude-Institut für Festkörperelektronik, Germany
Wolfgang Braun , Paul-Drude-Institut für Festkörperelektronik, Germany
Tianmo Liu , College of Materials Science and Engineering, Chongqing University, China
H. Jorg Osten , Institute of Electronic Materials and Devices, Hannover Leibniz University, Germany
pp. 436-440
Yi Zhou , National Key Laboratory of Micro/Nano Fabrication Technology, Inst. of Microelectronics, Peking University, Beijing, 100871, China
Fei Ding , National Key Laboratory of Micro/Nano Fabrication Technology, Inst. of Microelectronics, Peking University, Beijing, 100871, China
Chao Ni , National Key Laboratory of Micro/Nano Fabrication Technology, Inst. of Microelectronics, Peking University, Beijing, 100871, China
Wei Wang , National Key Laboratory of Micro/Nano Fabrication Technology, Inst. of Microelectronics, Peking University, Beijing, 100871, China
Wengang Wu , National Key Laboratory of Micro/Nano Fabrication Technology, Inst. of Microelectronics, Peking University, Beijing, 100871, China
pp. 441-444
Shailesh Madisetti , Institute for Micromanufacturing, Louisiana Tech University, USA
Zhiguo Zheng , Chemistry Department, Louisiana Tech University, USA
Zhongcheng Gong , Institute for Micromanufacturing, Louisiana Tech University, USA
Siva Penmetsa , Institute for Micromanufacturing, Louisiana Tech University, USA
Yuri Lvov , Institute for Micromanufacturing, Louisiana Tech University, USA
Long Que , Institute for Micromanufacturing, Louisiana Tech University, USA
pp. 445-448
Qinglong Zheng , Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan, U.S.A
Zhuo Wang , Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan, U.S.A
Yong Xu , Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan, U.S.A
pp. 449-453
Sewan Park , School of Electrical Engineering and Computer Science, Seoul National University, Republic of Korea
Joonyeop Lee , School of Electrical Engineering and Computer Science, Seoul National University, Republic of Korea
Hyeon Cheol Kim , School of Electrical Engineering, University of Ulsan, Republic of Korea
Kukjin , School of Electrical Engineering and Computer Science, Seoul National University, Republic of Korea
pp. 454-457
Yuguang Li , Department of Polymer Material, Shanghai University, 201800, China
Liping Wang , Department of Polymer Material, Shanghai University, 201800, China
Beilei Gu , Department of Polymer Material, Shanghai University, 201800, China
Haiyan Mao , Department of Polymer Material, Shanghai University, 201800, China
Hefeng Hu , Department of Polymer Material, Shanghai University, 201800, China
Li Liu , Department of Polymer Material, Shanghai University, 201800, China
Ying Gu , Department of electronic information materials, Shanghai University, 201800, China
Yiben Xia , Department of electronic information materials, Shanghai University, 201800, China
pp. 458-462
Huiqi He , Bioengineering Graduate Program, The Hong Kong University of Science and Technology, Hong Kong
Donald C. Chang , Dept of Biology, The Hong Kong University of Science and Technology, Hong Kong
Yi-Kuen Lee , Dept of Mechanical Engineering, The Hong Kong University of Science and Technology, Hong Kong
pp. 463-467
Chaohui Wang , School of Mechanical Engineering (Xi'an Jiaotong University), Shaanxi 7100049, China
Peng Ye , School of Mechanical Engineering (Xi'an Jiaotong University), Shaanxi 7100049, China
Kerun Lee , School of Mechanical Engineering (Xi'an Jiaotong University), Shaanxi 7100049, China
Jingju Wang , School of Mechanical Engineering (Xi'an Jiaotong University), Shaanxi 7100049, China
Jing Wang , School of Mechanical Engineering (Xi'an Jiaotong University), Shaanxi 7100049, China
pp. 468-471
Lei Nie , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Tielin Shi , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Zirong Tang , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Shiyuan Liu , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Guanglan Liao , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
pp. 472-475
Xuezhong Wu , School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, Hunan, China
Peitao Dong , School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, Hunan, China
Zhaoze li , School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, Hunan, China
Shengyi Li , School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, Hunan, China
Qinghui Liu , School of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha, Hunan, China
Chao Xu , School of Aerospace and Material Engineering, National University of Defense Technology, Changsha, Hunan, China
Hong Wan , School of Aerospace and Material Engineering, National University of Defense Technology, Changsha, Hunan, China
pp. 476-479
Jing Zhang , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Kaizhou Tan , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Siliu Xu , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Zhengfan Zhang , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Yukui Liu , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Guangbing Chen , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Kaicheng Li , National Laboratory of Analog Integrated Circuits, Chongqing 400060, 48China
Heming Zhang , Xidian University, Xi an 710071, China
Huiyong Hu , Xidian University, Xi an 710071, China
pp. 480-484
T. W. Chang , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
T. J. Chung , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
T. Ru , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
T. E. Nee , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
H. C. Lu , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
G. M. Wu , Institute of Electro-Optical Engineering, Chang Gung University, Kweisan, Taoyuan 333, Taiwan R.O.C.
pp. 485-488
Guangyi Shi , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yuexian Zoui , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yufeng Jin , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yali Zheng , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Wen J. Li , Cerntre of Micro and Nano Systems, The Chinese University of Hong Kong, HKSAR China
pp. 489-493
Li Zhang , State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Jun Yao , State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Dajia Wang , State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Hongsheng Zhong , Department of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu, China
pp. 494-497
Xuebin Lu , MEMS Center, Harbin Institute of Technology, China
Xiaowei Liu , MEMS Center, Harbin Institute of Technology, China
Rongyan Chuai , Information Science and Engineering School, Shenyang University of Technology, China
Changzhi Shi , MEMS Center, Harbin Institute of Technology, China
Mingxue Huo , MEMS Center, Harbin Institute of Technology, China
Weiping Chen , MEMS Center, Harbin Institute of Technology, China
pp. 498-501
Liang Yin , Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China
Xiaowei Liu , Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China
Wei Chen , Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China
Weiping Chen , Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China
Zhiping Zhou , Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China
pp. 502-505
Xu Mao , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Zhenchuan Yang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Zhihong Li , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Guizhen Yan , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 506-509
Yuntao Liu , MEMS Center of Harbin Institute of Technology, Harbin, China
Xiaowei Liu , MEMS Center of Harbin Institute of Technology, Harbin, China
Liang Yin , MEMS Center of Harbin Institute of Technology, Harbin, China
Weiping Chen , MEMS Center of Harbin Institute of Technology, Harbin, China
Qun Wu , MEMS Center of Harbin Institute of Technology, Harbin, China
pp. 510-513
Gang Zhao , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Yao Tian , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Qiong Shu , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Jing Chen , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
pp. 514-517
Chen-Chieh Liao , Mechanical&Electro-Mechanical Engineering, National Formosa University, Yunlin, Taiwan 632
Ju-Nan Kuo , Department of Automation Engineering, National Formosa University, Yunlin, Taiwan 632
pp. 518-521
Qingzhou Li , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
Ping Song , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
Kejie Li , School of Aerospace Science and Engineering, Beijing Institute of Technology, China
pp. 522-526
C.K. Chung , Dep't of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan 701, ROC
T.R. Shih , Dep't of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan 701, ROC
B.H. Wu , Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
pp. 527-530
Chuanwei Zhang , State Key Lab of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, China
Shiyuan Liu , State Key Lab of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, China
Tielin Shi , Division of Optoelectronic Materials and Micro-Nano Manufacture, Wuhan National Laboratory for Optoelectronics, China
pp. 531-534
C.K. Chung , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
T.R. Shih , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
B.H. Wu , Industrial Technology Research Institute, Tainan, Taiwan 701, ROC
pp. 535-538
Jenn-Sen Lin , Department of Mechanical Engineering, National United University, Taiwan, Republic of China
Shin-Pon Ju , Department of Mechanical and Electro-Mechanical Engineering; National Sun-Yat-Sen University, Kaohsiung, Taiwan, Republic of China
Shih-Wen Yung , Department of Material Science and Engineering, National United University, Taiwan, Republic of China
Wen-Shian Wu , Department of Mechanical and Electro-Mechanical Engineering; National Sun-Yat-Sen University, Kaohsiung, Taiwan, Republic of China
Meng-Hsiung Weng , Department of Mechanical and Electro-Mechanical Engineering; National Sun-Yat-Sen University, Kaohsiung, Taiwan, Republic of China
Wen-Jay Lee , Department of Mechanical and Electro-Mechanical Engineering; National Sun-Yat-Sen University, Kaohsiung, Taiwan, Republic of China
pp. 539-542
Guo L. Sun , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
Hai R. Wang , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
Zhuang D. Jiang , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
Xian N. Gao , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
Tian S. Yin , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
Guo Q. Han , State Key Laboratory for Manufacturing Systems Engineering (Xi'an Jiaotong University), Xi'an Shaanxi 710049, China
pp. 543-546
Shuhua Wei , Microelectronic Center, College of Information Engineering, North China University of Technology, Beijing, China
Jinzhao Zhang , Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, China
Li Han , Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, China
pp. 547-550
C.K. Chung , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
Y.L. Chang , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
T.S. Chen , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
pp. 551-554
Yumei. Xing , National Key Laboratory of Micro /Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication, Technology of Ministry of Education, Research Institute of Micro/N
Yigui Li , National Key Laboratory of Micro /Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication, Technology of Ministry of Education, Research Institute of Micro/N
Junfeng Zhang , National Key Laboratory of Micro /Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication, Technology of Ministry of Education, Research Institute of Micro/N
Gaoyang Gao , National Key Laboratory of Micro /Nano Fabrication Technology, Key Laboratory for Thin Film and Microfabrication, Technology of Ministry of Education, Research Institute of Micro/N
pp. 555-558
Fubo Rao , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Tie Li , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
Yuelin Wang , State Key Laboratories of Transducer Technology, National Key Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of
pp. 559-562
Yuexian Zou , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Guangyi Shi , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yufeng Jin , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yali Zheng , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
pp. 563-566
Fei Ding , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
Wenxuan Yu , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
Tingting Yu , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
Chao Ni , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
Ruyan Tang , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
Wengang Wu , National Key Laboratory of Micro/Nano Fabrication Technology, Institution of Microelectronics, Peking University, Beijing, China, 100871
pp. 567-571
Weiwei Xiang , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Li Wen , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Hai Wang , Department of Mechanical Engineering, Anhui University of Technology and Science, Wuhu, China
Qiuping Zhang , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Jiaru Chu , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
pp. 572-576
Li Wen , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Qiuping Zhang , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Hai Wang , Department of Mechanical Engineering, Anhui University of Technology and Science, Wuhu, China
Jiaru Chu , Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
pp. 577-580
Lujun Zhang , Electronic Instrumentation Laboratory, Delft University of Technology, the Netherlands
Andre Bossche , Electronic Instrumentation Laboratory, Delft University of Technology, the Netherlands
pp. 581-584
Yeon H. Kwak , Bio-medical Research Center, Korea Electronics Technology Institute, Korea
Soon S. Park , Bio-medical Research Center, Korea Electronics Technology Institute, Korea
Sung M. Hong , Bio-medical Research Center, Korea Electronics Technology Institute, Korea
pp. 585-588
Dezhi Wu , Dept. of Mechanical&Electrical Engineering, Xiamen University, 361005, China
Lingyun Wang , Dept. of Mechanical&Electrical Engineering, Xiamen University, 361005, China
Daoheng Sun , Dept. of Mechanical&Electrical Engineering, Xiamen University, 361005, China
pp. 589-592
Di Wang , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Xiaodong Chen , School of Economic and management, Harbin Institute of Technology, 150001, China
Qun Zhang , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Yu Liu , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Jincheng Liu , National Key Laboratory of Tunable Laser Technology, Harbin Institute of Technology, 150001, China
Lijiang Hu , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
pp. 593-596
Lan Qu , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
Chao Bian , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
Jizhou Sun , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
Zhenxing Ren , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
Jinghong Han , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
Shanhong Xia , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
pp. 597-600
D. Wu , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, China
H.Y. Mao , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, China
W.G. Wu , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, China
pp. 601-604
Yu Liu , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Zushun Lu , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Xiaodong Chen , School of Economic and management, Harbin Institute of Technology, 150001, China
Di Wang , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
Jincheng Liu , National Key Laboratory of Tunable Laser Technology, Harbin Institute of Technology, 150001, China
Lijiang Hu , Chemistry Department of Science School, Harbin Institute of Technology, 150001, China
pp. 605-608
Ki-Young Dong , College of Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136-713, Republic of Korea
Youngmin , College of Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136-713, Republic of Korea
Seung-IL Moon , College of Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136-713, Republic of Korea
Jinwoo Lee , College of Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136-713, Republic of Korea
Jinnil Choi , College of Engineering, Korea University, Anam-dong, Seongbuk-gu, Seoul 136-713, Republic of Korea
Byeong-Kwon Ju , Display and Nanosystem Laboratory, School of Electrical Engineering, College of Engineering, Korea University, 5-1, Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea
pp. 609-611
Ahra Lee , Advanced device engineering division, University Science and Technology, Korea
SangChul Lee , BSG co., LTD. Korea
Sungsik Lee , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Chang Han Je , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Sunghae Jung , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Myoung-Lae Lee , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Gunn Hwang , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Byoung-Gon Yu , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
Chang Auck Choi , Advanced i-MEMS team, Electrical Telecommunication Research Institute, Korea
pp. 612-615
Jun Xu , The School of Automation, Harbin University of Science and Technology, China
Bo You , The School of Automation, Harbin University of Science and Technology, China
Xin Li , Computer Center, Harbin University of Science and Technology, China
Jing Ma , The School of Automation, Harbin University of Science and Technology, China
pp. 616-619
Junfeng Zhang , Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nan
YiGui Li , Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nan
Chun Hui , Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nan
Yumei Xing , Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nan
Yang Gao , Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nan
pp. 620-623
Jie Gong , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Zirong Tang , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Tielin Shi , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Guanglan Liao , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Lei Nie , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
Shiyuan Liu , School of Mechanical Science&Engineering, Huazhong University of Science and Technology, Wuhan, China
pp. 624-627
Lukasz S. Pakula , Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands
Vijayekumar Rajaraman , Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands
Patrick J. French , Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands
pp. 628-631
Yuexian Zou , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yali Zheng , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Yufeng Jin , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
Guangyi Shi , The Key Laboratory of Integrated Microsystems, Shenzhen Graduate School of Peking University, China
pp. 632-636
Chi-Yuan Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Shuo-Jen Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Yu-Ming Lee , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
Kuan-Yu Chu , Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan, R.O.C.
pp. 637-640
Hsiao-Yeh Chu , Micro and Precision Manufacturing Center&Mechanical Engineering Department, Kun Shan University. Taiwan, R.O.C.
Ming-Hang Weng , Metal Industries Research&Development Centre. Taiwan, R.O.C.
Ru-Yuan Yang , Department of Materials Engineering, National Ping Tung University of Science&Technology. Taiwan, R.O.C.
Chien-Wei Huang , Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University. Taiwan, R.O.C.
Chia-Hsing Li , Micro and Precision Manufacturing Center&Mechanical Engineering Department, Kun Shan University. Taiwan, R.O.C.
pp. 641-644
Chakravarthy Yamarthy , Department of Electrical Engineering University of Louisville, KY, USA
Shamus McNamara , Department of Electrical Engineering University of Louisville, KY, USA
pp. 645-648
M. D. Nguyen , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
R. J. A. Steenwelle , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
P. M. te Riele , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
J. M. Dekkers , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
D. H. A. Blank , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
G. Rijnders , Inorganic Materials Science, Faculty of Science and Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
pp. 649-652
Yuping Zhang , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Yanyan Wang , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Lanxin Lv , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Shancheng Yan , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Haitao Wang , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Yong Zhang , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Dan Zhu , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Ningping Huang , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
Zhongdang Xiao , State Key Laboratory of Bioelectronics, School of Biological Science&Medical Engineering, Southeast University, Nanjing 210096, China
pp. 653-656
Rawat Jaisutti , Department of Physics, Faculty of Science, Mahidol University, Thailand
Wittawat Yamwong , Thai Microelectronics Center, National Electronics and Computer Technology Center, NSTDA, Thailand
Sirapat Pratontep , National Nanotechnology Center, National Science and Technology Development Agency, Thailand
Tanakorn Osotchan , Department of Physics, Faculty of Science, Mahidol University, Thailand
pp. 657-660
Zhuangde Jiang , State Key Lab for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Libo Zhao , State Key Lab for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Yulong Zhao , State Key Lab for Manufacturing Systems Engineering, Xi'an Jiaotong University, Shaanxi, China
Philip D. Prewett , School of Mechanical Engineering, University of Birmingham, Edgbaston, UK
Kyle Jiang , School of Mechanical Engineering, University of Birmingham, Edgbaston, UK
pp. 661-665
Jianjun Ye , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Jian Yang , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Jinyang Zheng , Institute of Chemical Engineering Process and Machinery, Zhejiang University, Hangzhou, 310027, China
Ping Xu , Institute of Applied Mechanics, Zhejiang University, Hangzhou, 310027, China
Chikong Lam , Department of Mechanical Engineering, University of California, Berkeley, 94704, U.S.A.
Ieong Wong , Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, 90095, U.S.A.
Yanbao Ma , Department of Mechanical and Aerospace Engineering, University of California, Los Angeles, 90095, U.S.A.
pp. 666-671
Henan Ni , Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, 200030, China
Liangcai Wu , Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, China
Zhitang Song , Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 200050, China
Chun Hui , College of Life Science Biotechnology, Shanghai Jiaotong University, 200030, China
pp. 672-675
Xin Xu , IMEP-LAHC, Minatec, Grenoble Institute of technology, 3 PARVIS LOUIS NEEL, 38016, France
Bogdan Bercu , IMEP-LAHC, Minatec, Grenoble Institute of technology, 3 PARVIS LOUIS NEEL, 38016, France
Francois Lime , IMEP-LAHC, Minatec, Grenoble Institute of technology, 3 PARVIS LOUIS NEEL, 38016, France
Laurent Montes , IMEP-LAHC, Minatec, Grenoble Institute of technology, 3 PARVIS LOUIS NEEL, 38016, France
pp. 676-681
Huajun Fang , Institute of Microelectronics, Tsinghua University, Beijing, China
Xingming Liu , Institute of Microelectronics, Tsinghua University, Beijing, China
Litian Liu , Institute of Microelectronics, Tsinghua University, Beijing, China
pp. 682-685
Chang-Zhi Shi , Department of Microelectronics, Harbin Institute of Technology, 150001, China
Xiao-Wei Liu , Department of Microelectronics, Harbin Institute of Technology, 150001, China
Rong-Yan Chuai , Information Science and Engineering School, Shenyang University of Technology, 110023, China
pp. 686-689
Shiyou Xu , Active Nanomaterials and Devices Laboratory, Mechanical department, Stevens Institute of Technology, Hoboken, NJ 07030, USA
Yong Shi , Active Nanomaterials and Devices Laboratory, Stevens Institute of Technology. Castle Point on Hudson, NJ 07029, USA
pp. 690-693
Surachai Pengmanayol , Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Bangkok 10400, Thailand
Tanakorn Osotchan , Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Bangkok 10400, Thailand
pp. 694-697
Dongbing Geng , School of Material Science and Technology, Wuhan University of Technology (WHUT), China
Liming Zeng , School of Material Science and Technology, Wuhan University of Technology (WHUT), China
Yi Li , Aerospace Research Institute of Materials and Processing Technology (ARIMT), China
pp. 698-702
Ji-Hong Kim , Department of Electrical Engineering, Korea University, Korea
Sung-Min Hong , Korea Electronics Technology Institute, Korea
Jang-Sub Lee , Korea Electronics Technology Institute, Korea
Byung-Moo Moon , Department of Electrical Engineering, Korea University, Korea
Kunnyun Kim , Korea Electronics Technology Institute, Korea
pp. 703-706
C. C. Su , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
C. H. Li , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
N. K. Chang , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
T. C. Wu , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
S. H. Chang , Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
pp. 707-710
Amir Farrokh Payam , Device Modelling and Simulation Lab, School of Electrical&Computer Engineering, University of Tehran, Iran
Morteza Fathipour , Device Modelling and Simulation Lab, School of Electrical&Computer Engineering, University of Tehran, Iran
Mohammad Java Yazdanpanah , School of Electrical&Computer Engineering, University of Tehran, Iran
pp. 711-716
Amir Farrokh Payam , Device Modelling and Simulation Lab, School of Electrical&Computer Engineering, University of Tehran, Iran
Mohammad Javad Yazdanpanah , School of Electrical&Computer Engineering, University of Tehran, Iran
Morteza Fathipour , Device Modelling and Simulation Lab, School of Electrical&Computer Engineering, University of Tehran, Iran
pp. 717-721
Guo Q. Han , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
Zhuang D. Jiang , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
Wei X. Jing , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
Hai R. Wang , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
Guo L. Sun , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
Ming Z. Zhu , State Key Laboratory for Manufacturing Systems Engineering, Xi'an Shaanxi 710049, China
pp. 722-725
Jing-Hui Wang , 1Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Taiwan
Meng-Ku Chi , 1Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Taiwan
Lung-Ming Fu , Graduate Institute of Materials Engineering, National Pingtung University of Science and Technology, Taiwan
Che-Hsin Lin , 1Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Taiwan
pp. 726-730
Hailin Cong , Department of Biomedical Engineering, University of California, Davis, USA
Tingrui Pan , Department of Biomedical Engineering, University of California, Davis, USA
pp. 731-734
Hailin Cong , Biomedical Engineering Department, University of California, Davis, USA
Alexander Revzin , Biomedical Engineering Department, University of California, Davis, USA
Tingrui Pan , Biomedical Engineering Department, University of California, Davis, USA
pp. 735-738
Wei Tang , The institute of microelectronic, Peking University, China
Zhe Chen , The institute of microelectronic, Peking University, China
Haixia Zhang , The institute of microelectronic, Peking University, China
pp. 739-742
Pin Lv , Institute of Microelectronics, Peking University, Beijing 100871, China
Zhe Chen , Institute of Microelectronics, Peking University, Beijing 100871, China
Alice H.X. Zhang , Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 743-746
Tzong-Shyng. Leu , Institute of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan
Horng-Jiann Song , Institute of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan
pp. 747-750
Chun-Ping Jen , Department of Mechanical Engineering, National Chung Cheng University, Chia-yi, Taiwan
Ching-Te Huang , Department of Mechanical Engineering, National Chung Cheng University, Chia-yi, Taiwan
Yun-Hung Lu , Department of Mechanical Engineering, National Chung Cheng University, Chia-yi, Taiwan
pp. 751-753
Deyong Chen , 1nstitute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, China
Zhengwei Wu , 1nstitute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, China
Xiaojing Shi , 1nstitute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, China
Junbo Wang , 1nstitute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, China
Lei Liu , 1nstitute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, China
pp. 754-757
Guang He , School of Aerospace Science and Engineering, Beijing Institute of Technology, BIT, China
Geng-Chen Shi , School of Aerospace Science and Engineering, Beijing Institute of Technology, BIT, China
pp. 758-762
Kui Zou , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Xiuhan Li , School of Electronics and Information Engineering, Beijing Jiaotong University, China, 100044
Haixia Zhang , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 763-766
Yung-Chun Lee , Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Pin-Chang Chen , Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Hung-Yi Lin , Mechanical and System Research Laboratory, ITRI, Hsinchu, Taiwan
pp. 767-770
Yunguang Ji , Dept. of Mechanical Engineering, The University of Akron, Ohio, USA
Yueh-Jaw Lin , Dept. of Mechanical Engineering, The University of Texas at Tyler, 75799 USA
Alper Buldum , Dept. of Physics, The University of Akron, Ohio, USA
pp. 771-774
Yung-Chun Lee , Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Yi-Chien Lin , Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Chen-Hui Tsai , Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan
pp. 775-778
Yung-Chun Lee , Department of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan
Hsueh-Liang Chen , Department of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan
Chun-Hung Chen , Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
Hung-Yi Lin , Mechanical and System Research Laboratory, ITRI, Hsinchu, Taiwan
pp. 779-782
C.K. Chung , Dep't of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 701, ROC
J.J. Jhu , Dep't of Mechanical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan 701, ROC
pp. 783-786
Shou-Ping Hsu , Dept. of Refrigeration, Air Conditioning and energy engineering, National Chin-Yi University of Technology, Taiwan
Kao-Feng Yarn , Dept. of Electronic Engineering, Far East University, Taiwan
Win-Jet Luo , Dept. of Refrigeration, Air Conditioning and energy engineering, National Chin-Yi University of Technology, Taiwan
I-Ting Hsieh , Dept. of Electronic Engineering, Far East University, Taiwan
Hong-Jun Ye , Dept. of Refrigeration, Air Conditioning and energy engineering, National Chin-Yi University of Technology, Taiwan
Meng-Hua Chung , Dept. of Refrigeration, Air Conditioning and energy engineering, National Chin-Yi University of Technology, Taiwan
pp. 787-792
Chi-Chang Lin , Institute of Biomedical Engineering, National Cheng Kung University, Tainan 701, Taiwan
Ying-Mei Yang , Institute of Biomedical Engineering, National Cheng Kung University, Tainan 701, Taiwan
Hsien-Chang Chang , Institute of Biomedical Engineering, National Cheng Kung University, Tainan 701, Taiwan
pp. 793-796
Xian Huang , Mechanical Engineering Department, Columbia University, New York, USA
Siqi Li , Chemistry and Biochemistry Department, University of South Carolina, Columbia, USA
Jerome Schultz , Bioengineering Department, University of California, Riverside, USA
Qian Wang , Chemistry and Biochemistry Department, University of South Carolina, Columbia, USA
Qiao Lin , Mechanical Engineering Department, Columbia University, New York, USA
pp. 797-802
Chengkuo Lee , Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), Singapore 117685
Jin Xie , Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), Singapore 117685
pp. 803-807
Chengkuo Lee , Department of Electrical and Computer Eng., National University of Singapore, 117576, Republic of Singapore
Wenfeng Xiang , Department of Electrical and Computer Eng., National University of Singapore, 117576, Republic of Singapore
Jayaraj Thillaigovindan , Department of Electrical and Computer Eng., National University of Singapore, 117576, Republic of Singapore
Fu-Li Hsiao , Department of Electrical and Computer Eng., National University of Singapore, 117576, Republic of Singapore
pp. 808-812
Yan-li Qu , The State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Zai-li Dong , The State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Steve C. H. Tung , The State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China
Wen J. Li , The State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, China
pp. 813-817
Zhen Chen , College of Chemistry and Molecular Engineering, Peking University, Beijing, CHINA
Yu Zhao , Institute of Microelectronics, Peking University, Beijing, CHINA
Wei Wang , Institute of Microelectronics, Peking University, Beijing, CHINA
Zhihong Li , Institute of Microelectronics, Peking University, Beijing, CHINA
pp. 818-821
Michael Junkin , Aerospace and Mechanical Engineering Department, University of Arizona, Tucson, 85721, USA
Donna D. Zhang , Department of Pharmacology and Toxicology, University of Arizona, Tucson, 85721, USA
Pak Kin Wong , Aerospace and Mechanical Engineering Department, University of Arizona, Tucson, 85721, USA
pp. 822-826
Mandy L. Y. Sin , Department of Aerospace and Mechanical Engineering, University of Arizona, Tucson, USA
Vinay Gidwani , Department of Biochemistry and Molecular Biophysics, University of Arizona, Tucson, USA
Vincent Gau , Genefluidics, Inc, Monterey Park, California, USA
Pak Kin Wong , Department of Aerospace and Mechanical Engineering, University of Arizona, Tucson, USA
pp. 827-831
Vinay Gidwani , Department of Biochemistry and Molecular Biophysics, University of Arizona, USA
Yi Lu , Department of Computer Science, University of Arizona, USA
Donna D. Zhang , Department of Pharmacology and Toxicology, University of Arizona, USA
Pak Kin Wong , Department of Aerospace and Mechanical Engineering, University of Arizona, USA
pp. 832-836
Guanghui Bai , Applied chemistry department, Xi'an University of Architecture&Technology, China
Wei Teng , Applied chemistry department, Xi'an University of Architecture&Technology, China
Xianggang Wang , Applied chemistry department, Xi'an University of Architecture&Technology, China
Hui Zhang , Pingshuo coal industry company, Shanxi, China
Peng Xu , Applied chemistry department, Xi'an University of Architecture&Technology, China
pp. 837-842
Sumana Kladsomboon , Department of Physics and Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Bangkok, 10400, Thailand
Sirapat Pratontep , National Nanotechnology Center, Thailand Science Park, Pathumthani 12120, Thailand
Theeraporn Puntheeranurak , Department of Physics and Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Bangkok, 10400, Thailand
Teerakiat Kerdcharoen , Department of Physics and Center of Nanoscience and Nanotechnology, Faculty of Science, Mahidol University, Bangkok, 10400, Thailand
pp. 843-847
Drazen Fabris , Santa Clara Center for Nanostructures, Santa Clara University, USA
Tsutomu Saito , Santa Clara Center for Nanostructures, Santa Clara University, USA
Toshishige Yamada , Santa Clara Center for Nanostructures, Santa Clara University, USA
Xuhui Sun , Santa Clara Center for Nanostructures, Santa Clara University, USA
Patrick Wilhite , Santa Clara Center for Nanostructures, Santa Clara University, USA
Cary Y. Yang , Santa Clara Center for Nanostructures, Santa Clara University, USA
pp. 848-853
Cheng-Hsin Chunag , Department of Mechanical Engineering&Institute of Nanotechnology, Southern Taiwan University, Tainan, TAIWAN
Yu-Chi Chen , Department of Mechanical Engineering&Institute of Nanotechnology, Southern Taiwan University, Tainan, TAIWAN
You-Ming Hsu , Department of Mechanical Engineering&Institute of Nanotechnology, Southern Taiwan University, Tainan, TAIWAN
Huei-Sheng Huang , Department of Medical Laboratory Science and Biotechnology, National Cheng Kung University, Tainan, TAIWAN
Fei-Bin Hsiao , Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, TAIWAN
Chin-Hung Wang , Micro System Technology Center, Institute Technology Research Institute Southern, Tainan, TAIWAN
pp. 854-857
Tao Sun , School of Electronics and Computer Science, University of Southampton, United Kingdom
Soichiro Tsuda , School of Electronics and Computer Science, University of Southampton, United Kingdom
Klaus-Peter Zauner , School of Electronics and Computer Science, University of Southampton, United Kingdom
Hywel Morgan , School of Electronics and Computer Science, University of Southampton, United Kingdom
pp. 858-863
Sadollah Ebrahimi , Department of Physics, Islamic Azad University of Mahabad, Iran
Jamshid Sabbaghzadeh , NSTR institute, AEOI, Iran
Maryamalsadat Lajvardi , NSTR institute, AEOI, Iran
Iraj Hadi , NSTR institute, AEOI, Iran
pp. 864-867
Yuan Li , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Zhenchuan Yang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
Guizhen Yan , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing 100871, China
pp. 868-871
Qiang Liu , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
Bo Liu , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
Zhihong Li , National Key Laboratory of Nano/Micro Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871, China
pp. 872-876
Chi-Chang Lin , Institute of Biomedical Engineering, National Cheng Kung University, Taiwan
Chen-Yuan Yu , Institute of Biomedical Engineering, National Cheng Kung University, Taiwan
Ying-Mei Yang , Institute of Biomedical Engineering, National Cheng Kung University, Taiwan
Yan-Fu Chen , Institute of Biomedical Engineering, National Cheng Kung University, Taiwan
Hsien-Chang Chang , Institute of Biomedical Engineering, National Cheng Kung University, Taiwan
pp. 877-880
Jian Luo , School of Electronics and Computer Science, University of Southampton, UK. SO17, 1BJ
Haitao Ding , School of Electronics and Computer Science, University of Southampton, UK. SO17, 1BJ
Michael Kraft , School of Electronics and Computer Science, University of Southampton, UK. SO17, 1BJ
pp. 881-884
C.K. Chung , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
T. C. Chen , Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan 701, ROC
T.R. Shih , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
W. T. Chang , Dep't of Mechanical Engineering, and Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan 701, ROC
pp. 885-888
Qinghui Liu , School of Mechatronics and Automation, National University of Defense Technology, Changsha, China
Xuezhong Wu , School of Mechatronics and Automation, National University of Defense Technology, Changsha, China
Di Di , School of Mechatronics and Automation, National University of Defense Technology, Changsha, China
Peitao Dong , School of Mechatronics and Automation, National University of Defense Technology, Changsha, China
Dapeng Fan , School of Mechatronics and Automation, National University of Defense Technology, Changsha, China
pp. 889-892
Zhuxin Dong , Department of Mechanical Engineering, University of Arkansas, US
Uchechukwu C. Wejinya , Department of Mechanical Engineering, University of Arkansas, US
Wen J. Li , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Hong Kong SAR
pp. 893-897
Ding-jun Xu , Institute of Intelligent Machines, Chinese Academy of Science, Hefei, Anhui, China
Zheng-yong Zhang , Institute of Intelligent Machines, Chinese Academy of Science, Hefei, Anhui, China
Zhen Yu , Institute of Intelligent Machines, Chinese Academy of Science, Hefei, Anhui, China
pp. 898-903
Chia-Hsien Yeh , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
Po-Wen Lin , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
Qiaole Zhao , School of Electronic Science and Engineering, Southeast University, China
Tsung-Che Chou , Industrial Technology Research Institute South, Microsystems Technology center, Taiwan
Yu-Cheng Lin , Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan
pp. 904-906
Xianju Huang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
Yu Tang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
Renxin Wang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
Chuang Qian , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
Wei Wang , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
Zhihong Li , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, CHINA
pp. 907-910
Shenggui Wang , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Liwei Lin , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Hang Guo , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
pp. 911-914
Yi Zhang , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Daqun Bao , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Hang Guo , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
pp. 915-918
Yu Jin Kim , Department of Chemical and Biological Engineering, Chungju National University, 72 Daehak-ro, 380-702, South Korea
Il-Kyu Park , Department of Applied Chemistry&Biological Engineering, Chungnam National University, 220, Gung-dong, Yuseong-gu, Daejeon 305-764, South Korea
Jin Soo Kim , Department of Chemical and Biological Engineering, Chungju National University, 72 Daehak-ro, 380-702, South Korea
Joon Hwang , Department of Aeronautical&Mechanical Engineering, Chungju National University, 72 Daehak-ro, 380-702, South Korea
Eui-Sik Chung , Department of Mechanical Design Engineering, Hanbat National University, San 16-1, DuckMyoung-Dong, Yuseong-gu, Daejeon, 305-719, South Korea
Kang Moo Huh , Department of Applied Chemistry&Biological Engineering, Chungnam National University, 220, Gung-dong, Yuseong-gu, Daejeon 305-764, South Korea
Yong-kyu Lee , Department of Chemical and Biological Engineering, Chungju National University, 72 Daehak-ro, 380-702, South Korea
pp. 919-922
Anzhou Hou , College of Life Science Biotechnology, Shanghai Jiaotong University, CHINA
Henan Ni , Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, CHINA
Chun Hui , College of Life Science Biotechnology, Shanghai Jiaotong University, CHINA
Ailan Xu , Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, CHINA
pp. 923-925
Yanfeng Jiang , Microelectronic Center, College of Information Engineering, North China University of Technology, 100144, Beijing, China
Xiaobo Zhang , Microelectronic Center, College of Information Engineering, North China University of Technology, 100144, Beijing, China
Bing Yang , Microelectronic Center, College of Information Engineering, North China University of Technology, 100144, Beijing, China
pp. 926-929
Yi-feng Wang , Zhejiang University of Science and Technology, Hangzhou 30012, China
Rui-jin Wang , Zhejiang University of Science and Technology, Hangzhou 30012, China
Ling-na Wang , Zhejiang University of Science and Technology, Hangzhou 30012, China
pp. 930-934
Shengli Zhou , Centre for Micro and Nano Systems, N. T., Hong Kong SAR, China
Qing Shan , Centre for Micro and Nano Systems, N. T., Hong Kong SAR, China
Fei Fei , Centre for Micro and Nano Systems, N. T., Hong Kong SAR, China
Wen J. Li , Centre for Micro and Nano Systems, N. T., Hong Kong SAR, China
Chung Ping Kwong , Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, N. T., Hong Kong SAR, China
Patrick C. K. Wu , Hong Kong Applied Science and Technology Research Institute Company Limited, Shatin, N. T., Hong Kong SAR, China
Bojun Meng , Hong Kong Applied Science and Technology Research Institute Company Limited, Shatin, N. T., Hong Kong SAR, China
Christina K. H. Chan , Hong Kong Applied Science and Technology Research Institute Company Limited, Shatin, N. T., Hong Kong SAR, China
Jay Y. J. Liou , Hong Kong Applied Science and Technology Research Institute Company Limited, Shatin, N. T., Hong Kong SAR, China
pp. 935-940
Jeou-Long Lee , Department of Chemical and Material Engineering, Lunghwa University of Science and Technology, Taoyuan 333, Taiwan
Yung-Kang Shen , School of Dental Technology, Taipei Medical University, 110, Taiwan
Yi Lin , Department of Business Administration, Takming University of Science and Technology, Taipei 104, Taiwan
Ping-Tun Teng , School of Mechanical Engineering, Taiwan University of Science and Technology, Taipei 104, Taiwan
Chuan-Min Huang , Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung 202, Taiwan
pp. 941-945
Yiting Yu , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Weizheng Yuan , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Bin Yan , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Taiping Li , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
Lanlan Wang , Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
pp. 946-949
S. Subramanian , Mechanical Engineering Department, Birla Institute of Technology and Science, Pilani, India
J. S. Rathore , Mechanical Engineering Department, Birla Institute of Technology and Science, Pilani, India
N. N. Sharma , Mechanical Engineering Department, Birla Institute of Technology and Science, Pilani, India
pp. 950-953
Benjaporn Treetharnmathurot , Department of Pharmaceutical Technology, Faculty of Pharmaceutical Sciences, Prince of Songkla University, Hat Yai, Songkhla, 90110, Thailand
Chitchamai Ovatlarnporn , Department of Pharmaceutical Chemistry, Faculty of Pharmaceutical Sciences, Prince of Songkla University, Hat Yai, Songkhla, 90110, Thailand
Juraithip Wungsinthaweekul , Department of Pharmacognosy and Pharmaceutical Botany, Faculty of Pharmaceutical Sciences, Prince of Songkla University, Hat Yai, Songkhla, 90110, Thailand
Ruedeekorn Wiwattanapatapee , Department of Pharmaceutical Technology, Faculty of Pharmaceutical Sciences, Prince of Songkla University, Hat Yai, Songkhla, 90110, Thailand
pp. 954-959
Yung-Chiang Chung , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Yu-Cheng Lin , Department of Engineering Science, National Cheng Kung University, Taiwan
Chaung-Di Chueh , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Chuan-You Ye , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Li-Wei Lai , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Wei-Chieh Liao , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
pp. 960-963
Ding Yuan , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Pengliang Ci , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Fei Tian , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Jing Shi , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Shaohui Xu , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Peisheng Xin , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
Lianwei Wang , Department of Electronic Engineering, East China Normal University, Shanghai, 200241, China
pp. 964-969
Her-Terng Yau , Department of Electrical Engineering, Far East University, Tainan, Taiwan
Cheng-Chi Wang , Department of Mechanical Engineering, Far East University, Tainan, Taiwan
Ching-Chang Cho , Department of Mechanical, Engineering, National Cheng-Kung University, Tainan, Taiwan
Ming-Jyi Jang , Department of Automation and Control, Far East University, Tainan, Taiwan
pp. 970-974
Cheng-Chi Wang , Mechanical Engineering, Far East University, Taiwan
Her-Terng Yau , Electrical Engineering, Far East University, Taiwan
Yen-Liang Yeh , Automation and Control Engineering, Far East University, Taiwan
Ming-Jyi Jang , Automation and Control Engineering, Far East University, Taiwan
Jing-Fung Lin , Computer Application Engineering, Far East University, Taiwan
pp. 975-979
Ru Zhang , School of Science, Beijing University of Posts and Telecommunications, China
Ying Zhang , School of Science, Beijing University of Posts and Telecommunications, China
Peilin Lang , School of Science, Beijing University of Posts and Telecommunications, China
Yuwen Duan , School of Science, Beijing University of Posts and Telecommunications, China
pp. 980-982
Ping Peng , Wuhan National Laboratory for Optoelectronics, 430074, China
Tielin Shi , Wuhan National Laboratory for Optoelectronics, 430074, China
Guanglan Liao , Wuhan National Laboratory for Optoelectronics, 430074, China
Zirong Tang , Wuhan National Laboratory for Optoelectronics, 430074, China
Chang Liu , Wuhan National Laboratory for Optoelectronics, 430074, China
pp. 983-986
Zhong Cao , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Meng-Xue Zeng , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Ling Zhang , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Xi-Xi Huang , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Ming-Xing Wang , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Fu-Chun Gong , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Shu-Zhen Tan , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
pp. 987-990
Shubin Yan , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Baohua Wang , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Yingzhan Yan , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Nini Hao , Shandong University of Science and Tecnology, Qingdao, China, 266510
Shaohui Wang , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Xiaohong Ren , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Xiongying Ye , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China 100084
Zhaoying Zhou , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China 100084
Chenyang Xue , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
Jun Liu , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan, China 030051
pp. 991-995
Yuwen Duan , Key Laboratory of Optical Communication&Lightwave Technologies(Ministry of Education), School of Sciences Beijing University of Posts and Telecommunications, China
Ru Zhang , Key Laboratory of Optical Communication&Lightwave Technologies(Ministry of Education), School of Sciences Beijing University of Posts and Telecommunications, China
Peilin Lang , Key Laboratory of Optical Communication&Lightwave Technologies(Ministry of Education), School of Sciences Beijing University of Posts and Telecommunications, China
Ying Zhang , Key Laboratory of Optical Communication&Lightwave Technologies(Ministry of Education), School of Sciences Beijing University of Posts and Telecommunications, China
pp. 996-999
Xin Liu , National Kay Laboratory for Electronic Measurement Technology, North University of China, China
Chenyang Xue , National Kay Laboratory for Electronic Measurement Technology, North University of China, China
Shubin Yan , National Kay Laboratory for Electronic Measurement Technology, North University of China, China
Jijun Xiong , National Kay Laboratory for Electronic Measurement Technology, North University of China, China
Wendong Zhang , National Kay Laboratory for Electronic Measurement Technology, North University of China, China
pp. 1000-1003
Karan K. Mehta , Dept. of Electrical Engineering, UCLA, Los Angeles, CA 90095, USA
Ting-Hsiang Wu , Dept. of Electrical Engineering, UCLA, Los Angeles, CA 90095, USA
Eric P.Y. Chiou , Dept. of Mechanical Engineering, UCLA, Los Angeles, CA 90095, USA
pp. 1004-1007
Jun Liu , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Guoqing Jiang , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Shubin Yan , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Shaohui Wang , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Yingzhan Yan , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Yanfeng Jing , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Jijun Xiong , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
Xiongying Ye , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Zhaoying Zhou , State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China
Wendong Zhang , National Key Laboratory For Electronic Measurement Technology, Key Laboratory of Instrumentation Science Dynamic Measurement, North University of China, Taiyuan 030051, China
pp. 1008-1012
Jing Wan , State key lab of ASIC and systems, Department of microelectronics, Fudan university, Shanghai 200433, China
Shao-Ren Deng , State key lab of ASIC and systems, Department of microelectronics, Fudan university, Shanghai 200433, China
Yifang Chen , Rutherford Appleton Laboratory, Chilton, Didcot, Oxon, OX11 0QX, UK
Ejaz Huq , Rutherford Appleton Laboratory, Chilton, Didcot, Oxon, OX11 0QX, UK
Ran Liu , State key lab of ASIC and systems, Department of microelectronics, Fudan university, Shanghai 200433, China
Xin-Ping Qu , State key lab of ASIC and systems, Department of microelectronics, Fudan university, Shanghai 200433, China
pp. 1013-1016
Min Nie , Department of Mechanical Engineering - Engineering Mechanics, Michigan Technological University, Houghton, USA
Pragnesh Patel , Department of Mechanical Engineering - Engineering Mechanics, Michigan Technological University, Houghton, USA
Kai Sun , Department of Materials Science and Engineering, University of Michigan, Ann Arbor, USA
Dennis Desheng Meng , Department of Mechanical Engineering - Engineering Mechanics, Michigan Technological University, Houghton, USA
pp. 1017-1020
Ryan Lemmens , Mechanical Engineering - Engineering Mechanics Department, Michigan Technological University, USA
Dennis Desheng Meng , Mechanical Engineering - Engineering Mechanics Department, Michigan Technological University, USA
pp. 1021-1025
Wei Qin , MEMS/NEMS Key Lab, Northwestern Polytechnical University, Xi'an, China
Weizheng Yuan , MEMS/NEMS Key Lab, Northwestern Polytechnical University, Xi'an, China
Honglong Chang , MEMS/NEMS Key Lab, Northwestern Polytechnical University, Xi'an, China
Liang Xue , MEMS/NEMS Key Lab, Northwestern Polytechnical University, Xi'an, China
Guangmin Yuan , MEMS/NEMS Key Lab, Northwestern Polytechnical University, Xi'an, China
pp. 1026-1030
Liang Xue , Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an, 710072, China
Weizheng Yuan , Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an, 710072, China
Honglong Chang , Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an, 710072, China
Chengyu Jiang , Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an, 710072, China
pp. 1031-1035
Yung-Chiang Chung , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Yen-Wen Hu , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Tsong-Long Hwang , Graduate Institute of Natural Products, Chang Gung University, Taiwan
Po-Wen Chen , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
Fong-Jian Sie , Graduate School of Mechanical-Electro Engineering, Ming Chi University of Technology, Taiwan
pp. 1036-1039
Yu Zhang , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong
Wen J. Li , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong
Osamu Tabata , Department of Micro Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, 606-8501, Japan
pp. 1040-1042
Peng Xiao , Department of Mechanical and Automation Engineering, Center for Micro and Nano Systems, CUHK, HK, China
Wen J. Li , Department of Mechanical and Automation Engineering, Center for Micro and Nano Systems, CUHK, HK, China
Ruxu Du , Department of Mechanical and Automation Engineering, Institute of Precision Engineering, CUHK, HK, China
pp. 1043-1047
Li Yang , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Hong Kong SAR, China
Mengxing Ouyang , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Hong Kong SAR, China
Wen J. Li , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Hong Kong SAR, China
pp. 1048-1053
2 (Abstract)
Jungil Park , School of Electrical Engineering, Korea University, Seoul, Korea
Sunyoung Ahn , Department of Nanophamaceutical and Life Science, Age-Related and Brain Disease Institute, Kyunghee University, Seoul, Korea
Youngmi Kim Pak , Department of Nanophamaceutical and Life Science, Age-Related and Brain Disease Institute, Kyunghee University, Seoul, Korea
James Jungho Pak , School of Electrical Engineering, Korea University, Seoul, Korea
pp. 1054-1057
Kang Wu , The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China
Xiongying Ye , The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China
Feng Chen , The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China
Litao Liu , The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China
Linrui Guo , Beijing Institute of Automatic Control Eqiupment, China
Zhaoying Zhou , The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China
pp. 1058-1061
Jin-Woo Kim , Department of Biological and Agricultural Engineering, University of Arkansas, Fayetteville, 72701, USA
Hyung-Mo Moon , Department of Biological and Agricultural Engineering, University of Arkansas, Fayetteville, 72701, USA
Steve Tung , Department of Mechanical Engineering, University of Arkansas, Fayetteville, 72701, USA
Hyun-Ho Lee , Department of Chemical Engineering, Myongji University, Yongin, Korea
pp. 1062-1064
Ju Seok Lee , The Cell and Molecular Biology Program, the University of Arkansas, Fayetteville, 72701 USA
Joon Jin Song , The Department of Mathematical Sciences, the University of Arkansas, Fayetteville, 72701 USA
Russell Deaton , The Department of Computer Science and Computer Engineering, the University of Arkansas, Fayetteville, 72701 USA
Jin-Woo Kim , The Cell and Molecular Biology Program, the University of Arkansas, Fayetteville, 72701 USA
pp. 1065-1068
Mi-Hyun Kang , MEMS&Nanotechnology Laboratory, Graduate school of Mechanical Engineering, Chonnam National University, Gwangju, Korea
Chang-Sin Park , MEMS&Nanotechnology Laboratory, Graduate school of Mechanical Engineering, Chonnam National University, Gwangju, Korea
Bo young Choi , MEMS&Nanotechnology Laboratory, School of Mechanical Systems Engineering, Chonnam National Universit, Gwangju, Korea
Dong-Weon Lee , MEMS&Nanotechnology Laboratory, School of Mechanical Systems Engineering, Chonnam National Universit, Gwangju, Korea
pp. 1069-1072
Jin Qiu , Spatial Photonics, Inc, Sunnyvale, CA, USA
Shawn Cunningham , WiSpry, Inc, Irvine, CA, USA
Arthur Morris , WiSpry, Inc, Irvine, CA, USA
pp. 1073-1078
Zhigang Wu , Department of Engineering Sciences, The Ângström Laboratory, Uppsala University, Sweden
Grzegorz Wicher , Department of Neuroscience, The Biomedical Center, Uppsala University, Sweden
Asa Fex Svenningsen , Department of Neuroscience, The Biomedical Center, Uppsala University, Sweden
Klas Hjort , Department of Engineering Sciences, The Ângström Laboratory, Uppsala University, Sweden
pp. 1079-1083
Shu Long , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Zhong Cao , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Yu-Ting Zhao , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Yi Zhou , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Ming-Xing Wang , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Yun-Lin Dai , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Fu-Chun Gong , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
Shu-Zhen Tan , College of Chemistry and Biological Engineering, Changsha University of Science and Technology, 410114, China
pp. 1084-1087
Guangmei Zhai , School of Material Science and Engineering, Chang'an University, China
Hua Gong , School of Material Science and Engineering, Chang'an University, China
Minqiang Wang , Electronic Materials Research Laboratory, Xi'an Jiao Tong University, China
Zhonghai Lin , School of Material Science and Engineering, Chang'an University, China
Kaiping Liu , School of Material Science and Engineering, Chang'an University, China
Daoli Zhang , Department of Electronic Science and Technology, Huazhong University of Science and Technology, China
pp. 1088-1091
Chunrong Peng , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190, China
Shanhong Xia , State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100190, China
pp. 1092-1095
Jialu Tang , MEMS Center, Harbin Instituted of Technology, China
Xiaowei Liu , MEMS Center, Harbin Instituted of Technology, China
Haifeng Zhang , MEMS Center, Harbin Instituted of Technology, China
pp. 1096-1098
Hai-feng Zhang , MEMS Center, Harbin Institute of Technology, 150001, China
Xiao-wei Liui , MEMS Center, Harbin Institute of Technology, 150001, China
Xian-hui Shao , MEMS Center, Harbin Institute of Technology, 150001, China
Xi-Lian Wang , MEMS Center, Harbin Institute of Technology, 150001, China
Bin Zhou , Military representative office in No 122 factor of PLA, Harbin, 150048, China
pp. 1099-1102
Jing Cui , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
Bingzhen Zhang , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
Jun Liu , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
Chengyang Xue , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
Guowen Liu , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
Xiaojuan Jia , Key Laboratory of Instrumentation Science&Dynamic Measurement Ministry of Education, North University Of China, China
pp. 1103-1106
Mingda Zhou , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
Yilong Hao , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
Chengchen Gao , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
Zhihong Li , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
Qifang Hu , National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China
pp. 1107-1111
Jie Chen , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Tao Guo , School of Information Science and Engineering, Xinjiang University, Urumqi, 830046, China
Hang Guo , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
pp. 1112-1116
Jie Chen , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
Tao Guo , School of Information Science and Engineering, Xinjiang University, Urumqi, 830046, China
Hang Guo , Pen-Tung Sah MEMS Research Center, Xiamen University, Fujian 361005, China
pp. 1117-1119
pp. vii-ix
pp. x-xiii
Plenary lecture 1: (Abstract)
Emmanuel Delamarche , Toyohashi University of Technology, Japan
pp. xiv-xv
Plenary lecture 2: (Abstract)
Hagen Klauk , Max Planck Institute for Solid State Research, Germany
pp. xvi
Plenary lecture 3: (Abstract)
Eiji Osawa , Toyohashi University of Technology, Japan
pp. xvii-xviii
Plenary lecture 4: (Abstract)
Ning Xi , Michigan State University, USA
pp. xix
Plenary lecture 5: (Abstract)
Fumihito Arai , Department of Bioengineering and Robotics, Tohoku University, Japan
pp. xx-xxi
Keynote Lecture 1: (Abstract)
Hiroyuki Noji , Institute of Scientific and Industrial Research, Osaka University, Japan
pp. xxii-xxiii
Keynote Lecture 2: (Abstract)
M. Lucia Curri , Italian National Research Council Institute for Physical and Chemical Processes, CNR IPCF, Bari, Italy
pp. xxiv-xxv
Keynote lecture 3: (Abstract)
Urs Staufer , Delft University of Technology, The Netherlands
pp. xxvi-xxvii
Keynote lecture 4: (Abstract)
Harry Heinzelmann , Nanotechnology&Life Sciences, Swiss Center for Electronics and Microtechnology (CSEM), Switzerland
pp. xxviii-xxix
Keynote lecture 5: (Abstract)
Michael A. Teitell , Division of Pediatric and Neonatal Pathology, Departments of Pathology and Pediatrics, University of California, Los Angeles, USA
pp. xxx
Ellis Meng , Department of Biomedical Engineering, University of Southern California, USA
pp. xxxi
Daniel T. Kamei , Department of Bioengineering, University of California, Los Angeles, USA
pp. xxxi
Pak Kin Wong , Department of Aerospace and Mechanical Engineering, University of Arizona, USA
pp. xxxii
Dean Ho , Department of Biomedical Engineering and Department of Mechanical Engineering, Northwestern University, USA
pp. xxxii
Zhihong Li , National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
pp. xxxiv
Wen J. Li , Centre for Micro and Nano Systems, The Chinese University of Hong Kong, China
pp. xxxiv
Michael Kraft , School of Electronics and Computer Science, Southampton University, UK
pp. xxxv
pp. xxxvi
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