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2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG)
Shenzhen, China
January 05-January 08
ISBN: 978-1-4244-4629-2
ASCII Text
x 
 
Xiaosheng Wu, Wenyuan Chen, Weiping Zhang, Yipeng Lu, Feng Cui, Xiaolin Zhao, "Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG)," International Conference on Nano/Micro Engineered and Molecular Systems, pp. 304-309, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009.
 
 
BibTex
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@article{ 10.1109/NEMS.2009.5068583,
author = {Xiaosheng Wu and Wenyuan Chen and Weiping Zhang and Yipeng Lu and Feng Cui and Xiaolin Zhao},
title = {Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG)},
journal ={International Conference on Nano/Micro Engineered and Molecular Systems},
volume = {0},
year = {2009},
isbn = {978-1-4244-4629-2},
pages = {304-309},
doi = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068583},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - International Conference on Nano/Micro Engineered and Molecular Systems
TI - Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG)
SN - 978-1-4244-4629-2
SP304
EP309
A1 - Xiaosheng Wu,
A1 - Wenyuan Chen,
A1 - Weiping Zhang,
A1 - Yipeng Lu,
A1 - Feng Cui,
A1 - Xiaolin Zhao,
PY - 2009
VL - 0
JA - International Conference on Nano/Micro Engineered and Molecular Systems
ER -
 
Xiaosheng Wu, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Wenyuan Chen, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Weiping Zhang, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Yipeng Lu, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Feng Cui, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
Xiaolin Zhao, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, China
A novel kind of MEMS micro-gyroscope, piezoelectric micromachined modal gyroscope (PMMG), is introduced in the paper. PMMG works with the special vibratory mode of solid material, and it is a kind of solid-state micro-gyroscope, which is different from micromachined vibratory gyroscope. There is no moving part and suspended structure in PMMG, and it is robust for the higher resistance to shock and shake. PMMG has no special requirement on vacuum package, so it has higher stability and reliability. The working mechanism of PMMG is introduced in the paper. A model of PMMG with concentrated masses is proposed in the paper, and using finite element method (FEM), its modal and harmonic analysis are compared with the model without concentrated mass. The results show that the model with concentrated masses has lower modal frequency and larger vibratory amplitude. The Coriolis effect analysis of the two kinds of model shows that the model with concentrated mass is favorable to increase the sensitivity of PMMG. The work of the paper provides theory foundation for further research of PMMG.
Citation:
Xiaosheng Wu, Wenyuan Chen, Weiping Zhang, Yipeng Lu, Feng Cui, Xiaolin Zhao, "Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG)," nems, pp.304-309, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009
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