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2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor
Shenzhen, China
January 05-January 08
ISBN: 978-1-4244-4629-2
Tianhua Zhang, Institute for Micromanufacturing, Louisiana Tech University, USA
Zhongcheng Gong, Institute for Micromanufacturing, Louisiana Tech University, USA
Long Que, Institute for Micromanufacturing, Louisiana Tech University, USA
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor is reported for the first time. It is a refractive-index sensitive optical sensor. The transducing signal varies upon the changes of the effective index of refraction in the sensing area, which is the Fabry-Perot cavity. This chemo/biosensor is made with PDMS and glass. Specifically, the micromachined Fabry-Perot interferometer (μFPI) and cavity is fabricated by bonding glass and the soft-lithographically patterned PDMS. Several chemicals have been detected with the prototype devices. Measurements show that at least 10ppm chemicals can be detected even without any performance optimization of the devices.
Citation:
Tianhua Zhang, Zhongcheng Gong, Long Que, "A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor," nems, pp.181-184, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009
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