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2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SOI-based capacitive micromechanical resonator with submicron gap-spacing
Shenzhen, China
January 05-January 08
ISBN: 978-1-4244-4629-2
ASCII Text
x 
 
Yi Liu, Yaquan Tang, Xiaomei Yu, "SOI-based capacitive micromechanical resonator with submicron gap-spacing," International Conference on Nano/Micro Engineered and Molecular Systems, pp. 130-133, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009.
 
 
BibTex
x
 
@article{ 10.1109/NEMS.2009.5068542,
author = {Yi Liu and Yaquan Tang and Xiaomei Yu},
title = {SOI-based capacitive micromechanical resonator with submicron gap-spacing},
journal ={International Conference on Nano/Micro Engineered and Molecular Systems},
volume = {0},
year = {2009},
isbn = {978-1-4244-4629-2},
pages = {130-133},
doi = {http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068542},
publisher = {IEEE Computer Society},
address = {Los Alamitos, CA, USA},
}
 
 
RefWorks Procite/RefMan/Endnote
x 
 
TY - CONF
JO - International Conference on Nano/Micro Engineered and Molecular Systems
TI - SOI-based capacitive micromechanical resonator with submicron gap-spacing
SN - 978-1-4244-4629-2
SP130
EP133
A1 - Yi Liu,
A1 - Yaquan Tang,
A1 - Xiaomei Yu,
PY - 2009
VL - 0
JA - International Conference on Nano/Micro Engineered and Molecular Systems
ER -
 
Yi Liu, MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
Yaquan Tang, MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
Xiaomei Yu, MEMS Research Center, Institute of Microelectronics Peking University, Beijing 100871, China
MEMS resonators are promising as micromechanical oscillators and filters in wireless communication systems. This paper reports on the fabrication and characterization of single crystal silicon (SCS) disk resonators with sub-micro capacitive gaps. Vertical capacitive gaps as small as 100nm have been demonstrated in this work. High frequency disk resonators have been implemented and tested.
Citation:
Yi Liu, Yaquan Tang, Xiaomei Yu, "SOI-based capacitive micromechanical resonator with submicron gap-spacing," nems, pp.130-133, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2009
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