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Fifth International Workshop on System-on-Chip for Real-Time Applications (IWSOC'05)
A pH-ISFET Based Micro Sensor System on Chip Using Standard CMOS Technology
Banff, Alberta, Canada
July 20-July 24
ISBN: 0-7695-2403-6
| ASCII Text | x | ||
| Haigang Yang, Hongguang Sun, Jinghong Han, Jinbao Wei, Zengjin Lin, Shanhong Xia, Hua Zhong, "A pH-ISFET Based Micro Sensor System on Chip Using Standard CMOS Technology," System-on-Chip for Real-Time Applications, International Workshop on, pp. 180-183, Fifth International Workshop on System-on-Chip for Real-Time Applications (IWSOC'05), 2005. | |||
| BibTex | x | ||
| @article{ 10.1109/IWSOC.2005.21, author = {Haigang Yang and Hongguang Sun and Jinghong Han and Jinbao Wei and Zengjin Lin and Shanhong Xia and Hua Zhong}, title = {A pH-ISFET Based Micro Sensor System on Chip Using Standard CMOS Technology}, journal ={System-on-Chip for Real-Time Applications, International Workshop on}, volume = {0}, year = {2005}, isbn = {0-7695-2403-6}, pages = {180-183}, doi = {http://doi.ieeecomputersociety.org/10.1109/IWSOC.2005.21}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - CONF JO - System-on-Chip for Real-Time Applications, International Workshop on TI - A pH-ISFET Based Micro Sensor System on Chip Using Standard CMOS Technology SN - 0-7695-2403-6 SP180 EP183 A1 - Haigang Yang, A1 - Hongguang Sun, A1 - Jinghong Han, A1 - Jinbao Wei, A1 - Zengjin Lin, A1 - Shanhong Xia, A1 - Hua Zhong, PY - 2005 KW - Micro Sensor System KW - SOC KW - ISFET KW - CMOS VL - 0 JA - System-on-Chip for Real-Time Applications, International Workshop on ER - | |||
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/IWSOC.2005.21
A monolithic pH sensor system has been studied and developed, based on standard CMOS technology. The micro system includes an on-chip integration of differential ISFET/REFET sensing devices, metal constructed pseudo reference electrode (PRE) and front-end measurement electronics. A post CMOS process flow is devised in our laboratory to allow the ISFET to be fabricated in a standard CMOS foundry with minimal modifications. The chip has been realized with Chartered Semiconductor?s 0.35 ?m, 4-metal and 2-poly layer CMOS process and operates at 3.3V. The total die area is 5mm2.Thanks to the on-chip signal conditioning; the micro sensor system achieves a superior sensitivity of 53.67mV/pH as well as an enhanced linearity. Hence, it demonstrates the possibility of embedding ISFET based micro sensor arrays in advanced digital, analog and mixed signal VLSI for the intelligent measurement required in various chemical, biochemical and biomedical applications.
Index Terms:
Micro Sensor System, SOC, ISFET, CMOS
Citation:
Haigang Yang, Hongguang Sun, Jinghong Han, Jinbao Wei, Zengjin Lin, Shanhong Xia, Hua Zhong, "A pH-ISFET Based Micro Sensor System on Chip Using Standard CMOS Technology," iwsoc, pp.180-183, Fifth International Workshop on System-on-Chip for Real-Time Applications (IWSOC'05), 2005
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