The purpose of this paper is to present a predictive error detection methodology, based on monitoring of long-term performance degradation of semiconductor systems. Delay variation is used to sense timing degradation due to aging (namely, due to NBTI), or to physical defects activated by long lifetime operation, which may occur in safety-critical systems (automotive, health, space). Error is prevented by detecting critical paths abnormal (but not fatal) propagation delays. A monitoring procedure and a programmable aging sensor are proposed. The sensor is selectively inserted in key locations in the design and can be activated either on user's requirement, or at pre-defined situations (e.g., at power-up). The sensor is optimized to exhibit low sensitivity to PVT (Process, power supply Voltage and Temperature) variations. Sensor limitations are analysed. A new sensor architecture and a sensor insertion algorithm are proposed. Simulation results are presented with a ST 65 nm sensor design.