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Third International Conference on Systems (icons 2008)
Carbon Nanostructures in MEMS Applications
April 13-April 18
ISBN: 978-0-7695-3105-2
A new field emission pressure sensor based on carbon nanotubes (CNTs) emitting array is described in this paper. The pressure sensor is based on the principle that the field emission current is correlated with the electrical field intensity, i.e. the variable anode-emitter distance caused by pressure changes when the applied voltage is fixed. The sensor consists of two main parts, silicon etched membrane anode and CNTs emitting array cathode. The silicon single crystal (Si) wafer with orientation is doped by phosphorus to obtain low resistant value. The CNTs were grown by plasma enhanced chemical vapour deposition by using iron as a catalyst in atmospheric pressure microwave torch. The field emission device has high emission current density, low threshold voltage, resistance to radiation, and quick response.
Index Terms:
Carbon nanotubes, pressure sensor, MEMS, field emission current
Richard Ficek, Radimir Vrba, Ondrej Jasek, Marek Elias, Lenka Zajickova, Hana Hornochova, "Carbon Nanostructures in MEMS Applications," icons, pp.93-96, Third International Conference on Systems (icons 2008), 2008
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