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2011 Second International Conference on Digital Manufacturing & Automation
Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM
Zhangjiajie, Hunan China
August 05-August 07
ISBN: 978-0-7695-4455-7
| ASCII Text | x | ||
| Qing Sheng Zhou, Su Rong Huang, Qi Zhang, "Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM," 2012 Third International Conference on Digital Manufacturing & Automation, pp. 277-279, 2011 Second International Conference on Digital Manufacturing & Automation, 2011. | |||
| BibTex | x | ||
| @article{ 10.1109/ICDMA.2011.74, author = {Qing Sheng Zhou and Su Rong Huang and Qi Zhang}, title = {Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM}, journal ={2012 Third International Conference on Digital Manufacturing & Automation}, volume = {0}, year = {2011}, isbn = {978-0-7695-4455-7}, pages = {277-279}, doi = {http://doi.ieeecomputersociety.org/10.1109/ICDMA.2011.74}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - CONF JO - 2012 Third International Conference on Digital Manufacturing & Automation TI - Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM SN - 978-0-7695-4455-7 SP277 EP279 A1 - Qing Sheng Zhou, A1 - Su Rong Huang, A1 - Qi Zhang, PY - 2011 KW - ultra-precision planar motor KW - temperature field KW - Finite Element Method VL - 0 JA - 2012 Third International Conference on Digital Manufacturing & Automation ER - | |||
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/ICDMA.2011.74
For water cooLing ultra-precision planar motor used for Lithography equipment, transient and steady thermal analyses are effectiveness to predict the temperature distribution and requirement on the water cooLing system. This paper investigates calculating the couple field of temperature field and fluid field of ultra-precision planar motor through 3D finite-element analysis (FEA). The analysis result provides foundation for improving motor performance, structural optimization as well as the design of cooLing system.
Index Terms:
ultra-precision planar motor, temperature field, Finite Element Method
Citation:
Qing Sheng Zhou, Su Rong Huang, Qi Zhang, "Calculation and Analysis of Temperature Field for Planar Motor Based on 3D FEM," icdma, pp.277-279, 2011 Second International Conference on Digital Manufacturing & Automation, 2011
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