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The First IEEE International Workshop on Electronic Design, Test and Applications (DELTA '02)
A Silicon Piezoresistive Pressure Sensor
Christchurch, New Zealand
January 29-January 31
ISBN: 0-7695-1453-7
Ranjit Singh, Singapore Polytechnic
Low Lee Ngo, Singapore Polytechnic
Ho Soon Seng, Singapore Polytechnic
Frederick Neo Chwee Mok, Singapore Polytechnic
The paper describes the design, simulation and fabrication of a silicon pressure sensor. The device makes use a of monocrystaline silicon square diaphragm supported by a thick silicon rim. The diaphragm is fabricated by etching away the bulk silicon on a defined region until the required thickness is achieved. The sensor makes use of four piezoresistors diffused into the surface of a diaphragm close to the edges. The piezoresistors are arranged in the Wheatstone bridge configuration to achieve higher voltage sensitivity and low temperature sensitivity. The sensor has been designed and simulated using COVENTER and ANSYS software tools. The paper also discuss the results obtained from the simulations and the response from the fabricated sensor.
Citation:
Ranjit Singh, Low Lee Ngo, Ho Soon Seng, Frederick Neo Chwee Mok, "A Silicon Piezoresistive Pressure Sensor," delta, pp.181, The First IEEE International Workshop on Electronic Design, Test and Applications (DELTA '02), 2002
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