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Los Angeles, CA
June 5, 2000 to June 9, 2000
ISBN: 1-58113-1897-9
pp: 671-674
Alexander Zelikovsky , Georgia State University, Atlanta, GA
Andrew B. Kahng , UCLA Computer Science Dept., Los Angeles, CA
Gabriel Robins , University of Virginia, Charlottesville, VA
Yu Chen , UCLA Computer Science Dept., Los Angeles, CA
We propose practical iterated methods for layout density control for CMP uniformity, based on linear programming, Monte-Carlo and greedy algorithms. We experimentally study the tradeoffs between two main filling objectives: minimizing density variation, and minimizing the total amount of inserted fill. Comparisons with previous filling methods show the advantages of our new iterated Monte-Carlo and iterated greedy methods. We achieve near-optimal filling with respect to each of the objectives and for both density models (spatial density [3] and effective density [8]). Our new methods are more efficient in practice than linear programming [3] and more accurate than non-iterated Monte-Carlo approaches [1].
ASIC, clock frequency, clock speed, comparison, custom
Alexander Zelikovsky, Andrew B. Kahng, Gabriel Robins, Yu Chen, "Practical Iterated Fill Synthesis for CMP Uniformity", DAC, 2000, Design Automation Conference, Design Automation Conference 2000, pp. 671-674, doi:10.1109/DAC.2000.855399
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