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Mar. 31, 2009 to Apr. 2, 2009
ISBN: 978-0-7695-3507-4
pp: 521-525
A multiblock partial least squares (MBPLS) based control scheme for serially connected systems is proposed. MBPLS can arrange a large number of variables into meaningful blocks for each stage of the large-scale system. Two control design strategies, course-to-course (CtC) and within-stage (WS) controls, are developed in the whole multistage course. In CtC, MBPLS control and optimization are done by applying feedback from the finished output quality when one course for all stages is done. It utilizes the information from the current course to improve quality of the next one. In WS, the MBPLS based re-optimization strategy is developed to explore the possible adjustments of the future inputs at the rest of the stages in order to fix up the disturbances just in time instead of until the next course run and to maintain the product specification when this course is finished. The proposed technique is successfully applied to a photolithography sequences system to demonstrate the advantages of the proposed method.
iterative learning control; multistage process; partial least squares
Junghui Chen, Ren-Kai Tsai, "Development of MBPLS Based Control for Serial Operation Processes", CSIE, 2009, Computer Science and Information Engineering, World Congress on, Computer Science and Information Engineering, World Congress on 2009, pp. 521-525, doi:10.1109/CSIE.2009.462
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