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Issue No.01 - Jan.-Feb. (2013 vol.33)
pp: 32-40
Chia-Ming Chang , Stanford University
Olav Solgaard , Stanford University
ABSTRACT
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
INDEX TERMS
Optical waveguides, Silicon, Annealing, Photonics, Waveguide components, Optical interconnections, Substrates, Photonic devices, waveguides, silicon photonics, optical interconnects, integrated optics devices
CITATION
Chia-Ming Chang, Olav Solgaard, "Monolithic Silicon Waveguides in Standard Silicon", IEEE Micro, vol.33, no. 1, pp. 32-40, Jan.-Feb. 2013, doi:10.1109/MM.2012.93
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