|
| This Article | ||
| ||
| Share | ||
| Bibliographic References | ||
| Add to: | ||
 Digg  Furl  Spurl  Blink  Simpy  Google  Del.icio.us  Y!MyWeb | ||
| Search | ||
| ||
Monolithic Silicon Waveguides in Standard Silicon
Jan.-Feb. 2013 (vol. 33 no. 1)
pp. 32-40
| ASCII Text | x | ||
| Chia-Ming Chang, Olav Solgaard, "Monolithic Silicon Waveguides in Standard Silicon," IEEE Micro, vol. 33, no. 1, pp. 32-40, Jan.-Feb., 2013. | |||
| BibTex | x | ||
| @article{ 10.1109/MM.2012.93, author = {Chia-Ming Chang and Olav Solgaard}, title = {Monolithic Silicon Waveguides in Standard Silicon}, journal ={IEEE Micro}, volume = {33}, number = {1}, issn = {0272-1732}, year = {2013}, pages = {32-40}, doi = {http://doi.ieeecomputersociety.org/10.1109/MM.2012.93}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - MGZN JO - IEEE Micro TI - Monolithic Silicon Waveguides in Standard Silicon IS - 1 SN - 0272-1732 SP32 EP40 EPD - 32-40 A1 - Chia-Ming Chang, A1 - Olav Solgaard, PY - 2013 KW - Optical waveguides KW - Silicon KW - Annealing KW - Photonics KW - Waveguide components KW - Optical interconnections KW - Substrates KW - Photonic devices KW - waveguides KW - silicon photonics KW - optical interconnects KW - integrated optics devices VL - 33 JA - IEEE Micro ER - | |||
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/MM.2012.93
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
Index Terms:
Optical waveguides,Silicon,Annealing,Photonics,Waveguide components,Optical interconnections,Substrates,Photonic devices,waveguides,silicon photonics,optical interconnects,integrated optics devices
Citation:
Chia-Ming Chang, Olav Solgaard, "Monolithic Silicon Waveguides in Standard Silicon," IEEE Micro, vol. 33, no. 1, pp. 32-40, Jan.-Feb. 2013, doi:10.1109/MM.2012.93
Usage of this product signifies your acceptance of the Terms of Use.