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Monolithic Silicon Waveguides in Standard Silicon
Jan.-Feb. 2013 (vol. 33 no. 1)
pp. 32-40
Chia-Ming Chang, Stanford University
Olav Solgaard, Stanford University
A methodology allows fabrication of silicon-photonic devices in standard silicon wafers, eliminating the need for silicon-on-insulator (SOI) wafers. Using this technology, the authors demonstrate low-loss silicon waveguides (2.34 dB/cm), comparable to conventional SOI channel waveguides. The ease and flexibility of this fabrication method simplify integration of electronics and photonics and make it a possible alternative to SOI-based technology for implementation of silicon-photonic devices and systems.
Index Terms:
Optical waveguides,Silicon,Annealing,Photonics,Waveguide components,Optical interconnections,Substrates,Photonic devices,waveguides,silicon photonics,optical interconnects,integrated optics devices
Citation:
Chia-Ming Chang, Olav Solgaard, "Monolithic Silicon Waveguides in Standard Silicon," IEEE Micro, vol. 33, no. 1, pp. 32-40, Jan.-Feb. 2013, doi:10.1109/MM.2012.93
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