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Issue No.03 - May/June (2003 vol.23)
pp: 36-44
Bruno Murari , STMicroelectronics
ABSTRACT
<p>Microelectromechanical systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. Learn about the state of the art, from inertial sensors to microfluidic devices.</p>
CITATION
Bruno Murari, "Integrating Nonelectronic Components into Electronic Microsystems", IEEE Micro, vol.23, no. 3, pp. 36-44, May/June 2003, doi:10.1109/MM.2003.1209465
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