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Issue No.03 - May/June (2010 vol.27)
pp: 54-61
Manish Sharma , Mentor Graphics, Wilsonville
Chris Schuermyer , Mentor Graphics, Wilsonville
Brady Benware , Mentor Graphics, Wilsonville
<p>The cost and cycle time for determining the root cause of yield loss continues to increase as semiconductor technology scales down. A new technique, Axiom, helps yield and product engineers determine the root cause of loss directly from diagnosis results. Consequently, root-cause cycle time is dramatically reduced, resulting in a higher physical-failure analysis success rate and reduced costs.</p>
Axiom, design and test, test failure data, yield loss, diagnosis-driven yield analysis
Manish Sharma, Chris Schuermyer, Brady Benware, "Determination of Dominant-Yield-Loss Mechanism with Volume Diagnosis", IEEE Design & Test of Computers, vol.27, no. 3, pp. 54-61, May/June 2010, doi:10.1109/MDT.2009.94
1. R. Minixhofer and D. Rathei, "Using TCAD for Fast Analysis of Misprocessed Wafers and Yield Excursions," Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., IEEE Press, 2005, pp. 197-199.
2. F. Lee and S. Smith, "Yield Analysis and Data Management Using Yield Manager," Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., IEEE Press, 1998, pp. 19-30.
3. G.M. Scher, "Wafer Tracking Comes of Age," Semiconductor Int'l, vol. 14, no. 6, 1991, pp. 126-131.
4. D. Appello et al., "Yield Analysis of Logic Circuits," Proc. 22nd VLSI Test Symp., IEEE CS Press, 2004, pp. 103-108.
5. H. Erb, C. Burmer, and A. Leininger, "Yield Enhancement through Fast Statistical Scan Test Analysis for Digital Logic," Proc. IEEE/SEMI Advanced Semiconductor Manufacturing Conf., IEEE Press, 2005, pp. 250-255.
6. C. Hora et al., "An Effective Diagnosis Method to Support Yield Improvement," Proc. Int'l Test Conf. (ITC 02), IEEE CS Press, 2002, pp. 260-269.
7. B. Kruseman et al., "Systematic Defects in Deep Sub-Micron Technologies," Proc. Int'l Test Conf. (ITC 04), IEEE CS Press, 2004, pp. 290-299.
8. M. Keim et al., "A Rapid Yield Learning Flow Based on Production Integrated Layout-Aware Diagnosis," Proc. Int'l Test Conf. (ITC 06), IEEE CS Press, 2006, pp. 216-225.
9. A. Leininger et al., "Compression Mode Diagnosis Enables High Volume Monitoring Diagnosis Flow," Proc. Int'l Test Conf. (ITC 05), IEEE CS Press, 2005, pp. 156-165.
10. H. Tang et al., "Analyzing Volume Diagnosis Results with Statistical Learning for Yield Improvement," Proc. 12th European Test Symp. (ETS 07), IEEE CS Press, 2007, pp. 145-150.
11. M. Sharma et al., "Efficiently Performing Yield Enhancements by Identifying Dominant Physical Root Cause from Test Fail Data," Proc. Int'l Test Conf., (ITC 08), IEEE CS Press, 2008, article 14.3.
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