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Layout Proximity Effects and Modeling Alternatives for IC Designs
March/April 2010 (vol. 27 no. 2)
pp. 18-25
Xi-Wei Lin, Synopsys
Victor Moroz, Synopsys

Editor's note:

Layout-dependent variations significantly affect device modeling, model extraction, and design solutions. A novel approach is proposed in this article to seamlessly integrate physical models of lithography, strained Si, and ion implantation processes, with layout geometry for efficient model generation.

—Yu Cao, Arizona State University

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Index Terms:
CMOS, compact model, design and test, extraction, layout, lithography, mobility, proximity, stress, threshold voltage, variability
Citation:
Xi-Wei Lin, Victor Moroz, "Layout Proximity Effects and Modeling Alternatives for IC Designs," IEEE Design & Test of Computers, vol. 27, no. 2, pp. 18-25, March-April 2010, doi:10.1109/MDT.2010.48
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