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ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis
July/August 2007 (vol. 24 no. 4)
pp. 352-361
Federico Di Palma, University of Pavia
Giuseppe De Nicolao, University of Pavia
Guido Miraglia, STMicroelectronics
Oliver M. Donzelli, STMicroelectronics
Process diagnosis is critical to the semiconductor industry. Early detection of faulty process steps can dramatically reduce business losses and accelerate the development cycle of new products. This article proposes a novel methodology called AC/ID (automatic classification/interactive diagnosis) that can isolate the root causes of yield loss by combining end-of-line tests (such as wafer sort test) with process history information. The authors have automated the AC/ID methodology in a software tool, ACID (Automatic Classification for Interactive Design), which is fully operational at industrial production sites.
Index Terms:
AC/ID methodology, semiconductor manufacturing, fault diagnosis, electrical sort test, commonality analysis, pattern recognition, statistical methods
Federico Di Palma, Giuseppe De Nicolao, Guido Miraglia, Oliver M. Donzelli, "ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis," IEEE Design & Test of Computers, vol. 24, no. 4, pp. 352-361, July-Aug. 2007, doi:10.1109/MDT.2007.119
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