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Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams
October-December 1999 (vol. 16 no. 4)
pp. 58-65
This article presents the entire process of calibrating an electromechanical simulator: identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device. The simulation model for vertical electrostatically actuated polysilicon beams is calibrated to a wide range of electrical and optical measurements of test structures, and is then used to predict the behavior of more complex dual-bias-electrode structures. We address various mechanical discontinuities and post-buckled pull-in behavior while avoiding arbitrary fitting coefficients that limit generality. The well-characterized behavior of the dual-electrode structures can serve as verification test cases for evaluating coupled electromechanical simulators.
Index Terms:
electromechanical, polysilicon, material properties, buckling, gold
Citation:
Edward K. Chan, Krishna Garikipati, Robert W. Dutton, "Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams," IEEE Design & Test of Computers, vol. 16, no. 4, pp. 58-65, Oct.-Dec. 1999, doi:10.1109/54.808212
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