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Evaluation of MEMS Capacitive Accelerometers
October-December 1999 (vol. 16 no. 4)
pp. 48-56
This article investigates the response and survivability of microelectromechanical systems (MEMS) "low-g" capacitive accelerometers to high-g shock levels. We evaluated three different capacitive accelerometers: Silicon Designs, Inc. (SDI) 1220 accelerometer, Analog Devices (AD) ADXL 181-1000 accelerometer, and Endevco 7290A-100 accelerometer. We chose these devices due to their differing maximum g sensing levels (MGSL). The SDI devices survived to 70 kgn, whereas the AD and Endevco devices survived to 60 kgn and 30 kgn, respectively. Each device possessed a time delay or lag in response to the applied shock when compared to a reference accelerometer. The devices were each evaluated above and below their MGSL to determine their linearity, response times, lag times, pulse duration, survivability levels, and failure modes.
Citation:
Alain Béliveau, Guy T. Spencer, Keith A. Thomas, Scott L. Roberson, "Evaluation of MEMS Capacitive Accelerometers," IEEE Design & Test of Computers, vol. 16, no. 4, pp. 48-56, Oct.-Dec. 1999, doi:10.1109/54.808209
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