|
| This Article | ||
| ||
| Share | ||
| Bibliographic References | ||
| Add to: | ||
 Digg  Furl  Spurl  Blink  Simpy  Google  Del.icio.us  Y!MyWeb | ||
| Search | ||
| ||
Evaluation of MEMS Capacitive Accelerometers
October-December 1999 (vol. 16 no. 4)
pp. 48-56
| ASCII Text | x | ||
| Alain Béliveau, Guy T. Spencer, Keith A. Thomas, Scott L. Roberson, "Evaluation of MEMS Capacitive Accelerometers," IEEE Design & Test of Computers, vol. 16, no. 4, pp. 48-56, October-December, 1999. | |||
| BibTex | x | ||
| @article{ 10.1109/54.808209, author = {Alain Béliveau and Guy T. Spencer and Keith A. Thomas and Scott L. Roberson}, title = {Evaluation of MEMS Capacitive Accelerometers}, journal ={IEEE Design & Test of Computers}, volume = {16}, number = {4}, issn = {0740-7475}, year = {1999}, pages = {48-56}, doi = {http://doi.ieeecomputersociety.org/10.1109/54.808209}, publisher = {IEEE Computer Society}, address = {Los Alamitos, CA, USA}, } | |||
| RefWorks Procite/RefMan/Endnote | x | ||
| TY - MGZN JO - IEEE Design & Test of Computers TI - Evaluation of MEMS Capacitive Accelerometers IS - 4 SN - 0740-7475 SP48 EP56 EPD - 48-56 A1 - Alain Béliveau, A1 - Guy T. Spencer, A1 - Keith A. Thomas, A1 - Scott L. Roberson, PY - 1999 VL - 16 JA - IEEE Design & Test of Computers ER - | |||
DOI Bookmark: http://doi.ieeecomputersociety.org/10.1109/54.808209
This article investigates the response and survivability of microelectromechanical systems (MEMS) "low-g" capacitive accelerometers to high-g shock levels. We evaluated three different capacitive accelerometers: Silicon Designs, Inc. (SDI) 1220 accelerometer, Analog Devices (AD) ADXL 181-1000 accelerometer, and Endevco 7290A-100 accelerometer. We chose these devices due to their differing maximum g sensing levels (MGSL). The SDI devices survived to 70 kgn, whereas the AD and Endevco devices survived to 60 kgn and 30 kgn, respectively. Each device possessed a time delay or lag in response to the applied shock when compared to a reference accelerometer. The devices were each evaluated above and below their MGSL to determine their linearity, response times, lag times, pulse duration, survivability levels, and failure modes.
Citation:
Alain Béliveau, Guy T. Spencer, Keith A. Thomas, Scott L. Roberson, "Evaluation of MEMS Capacitive Accelerometers," IEEE Design & Test of Computers, vol. 16, no. 4, pp. 48-56, Oct.-Dec. 1999, doi:10.1109/54.808209
Usage of this product signifies your acceptance of the Terms of Use.