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Issue No.04 - October-December (1999 vol.16)
pp: 39-47
This article presents a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical single-chip devices. The flow includes steps for both sensor and circuit design, and also addresses the issues of sensor-circuit interaction. The importance of packaging in a MEMS design flow is covered. Three practical examples based on inertial-sensor technology illustrate several steps in the flow, namely the mechanical schematic, the layout simulation, and package interaction. In the case of package interaction, experimental results are presented.
Nicholas R. Swart, "A Design Flow for Micromachined Electromechanical Systems", IEEE Design & Test of Computers, vol.16, no. 4, pp. 39-47, October-December 1999, doi:10.1109/54.808207
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