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A Design Flow for Micromachined Electromechanical Systems
October-December 1999 (vol. 16 no. 4)
pp. 39-47
This article presents a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical single-chip devices. The flow includes steps for both sensor and circuit design, and also addresses the issues of sensor-circuit interaction. The importance of packaging in a MEMS design flow is covered. Three practical examples based on inertial-sensor technology illustrate several steps in the flow, namely the mechanical schematic, the layout simulation, and package interaction. In the case of package interaction, experimental results are presented.
Citation:
Nicholas R. Swart, "A Design Flow for Micromachined Electromechanical Systems," IEEE Design & Test of Computers, vol. 16, no. 4, pp. 39-47, Oct.-Dec. 1999, doi:10.1109/54.808207
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