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Engineering a Device for Electron-Beam Probing
May/June 1989 (vol. 6 no. 3)
pp. 36-49

The principles of electron-beam probing for diagnostic work are described. Guidelines are presented to help users of electron-beam probe stations optimize their IC design and manufacturing procedures for electron-beam probing. The guidelines cover: observability, maintaining line of sight, direct versus indirect measuring, using test points, accuracy, improving signal-to-noise ratio, reducing crosstalk, maintaining a consistent environment, usability, reducing acquisition time, packaging, and linking with CAD/CAE databases.

Citation:
William T. Lee, "Engineering a Device for Electron-Beam Probing," IEEE Design & Test of Computers, vol. 6, no. 3, pp. 36-49, May-June 1989, doi:10.1109/54.32411
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