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Issue No.03 - May/June (1989 vol.6)
pp: 36-49
ABSTRACT
<p>The principles of electron-beam probing for diagnostic work are described. Guidelines are presented to help users of electron-beam probe stations optimize their IC design and manufacturing procedures for electron-beam probing. The guidelines cover: observability, maintaining line of sight, direct versus indirect measuring, using test points, accuracy, improving signal-to-noise ratio, reducing crosstalk, maintaining a consistent environment, usability, reducing acquisition time, packaging, and linking with CAD/CAE databases.</p>
CITATION
William T. Lee, "Engineering a Device for Electron-Beam Probing", IEEE Design & Test of Computers, vol.6, no. 3, pp. 36-49, May/June 1989, doi:10.1109/54.32411
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