Issue No.04 - July/August (1986 vol.3)
Teruo Tamama , NTT Electrical Communications Laboratories
Norio Kuji , NTT Electrical Communications Laboratories
Using design data, the system can prepare a logic-state map for the device under test. The map draws top-layer connectionsin different colors according to their expected logic states so the map may be compared to the DUT image observed by the electron-beamtester. The system has successfully tested a 75K-transistor VLSI device.
Teruo Tamama, Norio Kuji, "Integrating an Electron-Beam System into VLSI Fault Diagnosis", IEEE Design & Test of Computers, vol.3, no. 4, pp. 23-29, July/August 1986, doi:10.1109/MDT.1986.294966