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A Fully-Automated Electron Beam Test System for VLSI Circuits
September/October 1985 (vol. 2 no. 5)
pp. 74-82
Norio Kuji, Atsugi Electrical Communication Laboratory
Teruo Tamama, Atsugi Electrical Communication Laboratory
Takao Yano, Atsugi Electrical Communication Laboratory
A fully automated, stroboscopic electrobeam test system that analyzes the behavior of logic VLSI circuits, this system consistsof a stroboscopic electron-beam tester combined with an LSI CAD system. LSI circuit design data, read from the CAD system,provides a designed map. The host computer performs interconnection pattern recognition by superimposing this map onto anobserved stroboscopic SEM image. Then, once the circuit nodes for voltage waveform measurements are automatically determinedon the superimposed map. Next, the electron beam is positioned on the actual circuit-under-test wires. These automatic processesresult in measured waveforms, which are displayed on the host computer terminal. This system has been applied to a 2.3K-gatelogic LSI circuits, and has been successful in locating the critical path. This system, coupled with the recently developedfault diagnostic electron-beam tester, Finder, constitutes a unified electron-beam test system.
Citation:
Norio Kuji, Teruo Tamama, Takao Yano, "A Fully-Automated Electron Beam Test System for VLSI Circuits," IEEE Design & Test of Computers, vol. 2, no. 5, pp. 74-82, Sept.-Oct. 1985, doi:10.1109/MDT.1985.294820
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