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MEMS: Small machines for the microelectronics age
January 1996 (vol. 29 no. 1)
pp. 93-94
Citation:
David A. Koester, Karen W. Markus, Mark D. Walters, "MEMS: Small machines for the microelectronics age," Computer, vol. 29, no. 1, pp. 93-94, Jan. 1996, doi:10.1109/2.481497
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