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MOS Scaling (PDF)
January 1980 (vol. 13 no. 1)
pp. 8-13
J. Hayes, Synertek
Basic MOS feature dimensions may fall to the 0.5?m level by the mid-1980's. Such scaling will create new challenges related to registration accuracy, dimensional control, and defect density.
Citation:
J. Hayes, "MOS Scaling," Computer, vol. 13, no. 1, pp. 8-13, Jan. 1980, doi:10.1109/MC.1980.1653335
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